We report on Scanning Kelvin Probe Microscopy of thin praseodymium oxide layers produced by pulsed laser deposition on silicon substrates. These measurements allow an almost direct quantification of the charge state of both interface and bulk of the films. Surprisingly, we find an apparent change in the charge distribution as a result of exposing the structure to ambient air: Immediately after deposition, negative charges are trapped at the interface between film and silicon substrate, and positive charges in the film bulk. After exposure to ambient air for about a week, a dramatic change of surface potentials is observed, including the sign of the charges.Whereas the influence of growth related parameters like film thickness on the surface potential by can be easily investigated, the role of ageing under ambient conditions is, presently, by far not understood. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)