Pulsed laser deposition of TiO2: diagnostic of the plume and characterization of nanostructured deposits

Walczak, Malgorzata; Oujja, M.; Marco, José F.; Sanz, Mikel; Castillejo, Marta

doi:10.1007/s00339-008-4704-y

Cited by 32 publications

(25 citation statements)

References 20 publications

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“…The as deposited sample ( Fig. 6(a)) exhibits a sharp and intense spin orbit doublet of Ti 2p with 2p 3/2 peak at 458.2 eV and a spin orbit splitting (S.O.S) of 5.6 eV which indicate the formation of stoichiometric TiO 2 [45][46][47][48]. A sharp Ti 2p 3/2 peak with Full Width at Half Maximum (FWHM) of 1.5 eV supports observed XRD and Raman data for the formation of anatase TiO 2 without other phases of TiO 2 .…”

Section: Resultsmentioning

confidence: 98%

Ion beam induced chemical and morphological changes in TiO2 films deposited on Si(111) surface by pulsed laser deposition

Mohanta¹,

Medicherla

Mohanta

et al. 2015

Applied Surface Science

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Section: Resultsmentioning

confidence: 98%

Ion beam induced chemical and morphological changes in TiO2 films deposited on Si(111) surface by pulsed laser deposition

Mohanta¹,

Medicherla

Mohanta

et al. 2015

Applied Surface Science

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“…Physical vapor deposition (PVD) and chemical vapor deposition (CVD) are the two most common types of thin film formation methods. PVD methods such as thermal evaporation and sputtering involve atom by atom, molecule by molecule growth, or ion deposition on various materials in a vacuum system [21][22][23]. CVD and sol-gel methods are less expensive than PVD [24,25].…”

Section: Solution-based Thin Film Formationmentioning

confidence: 99%

Heat Treatment in Molecular Precursor Method for Fabricating Metal Oxide Thin Films

Nagai¹,

Sato²

2012

Heat Treatment - Conventional and Novel Applications

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“…11 The gold targets (99.99% purity; Quorum Technologies, Kent, UK) were placed on a rotating sample holder to avoid cratering during repetitive irradiation. Deposits were prepared in vacuum using a Q-switched Nd:YAG (Lotis TII LS-2147) operating at 213 nm (5th harmonic of the fundamental radiation, full width half maximum (FWHM) 15 ns), at a repetition rate of 10 Hz.…”

Section: Experimental a Preparation And Characterization Of Goldmentioning

confidence: 99%

“…Pulsed laser deposition (PLD) has emerged as an attractive technique for the fabrication of well-defined nanostructures and surface morphologies of various materials because of the ability to control the dimensions and the crystalline phase by varying the laser parameters and the deposition conditions. [8][9][10][11][12][13] This technique also offers the capability for producing epitaxial growth, and it has extensively been applied to produce metal nanoparticles. 14 Mechanical biosensors are based on the principle that molecular recognition on the surface of a bio-functionalized micromechanical system (e.g., a cantilever) can result in a bending (deflection) of a few nanometers.…”

Section: Introductionmentioning

confidence: 99%

Gold coating of micromechanical DNA biosensors by pulsed laser deposition

Rebollar

Sanz

Esteves³

et al. 2012

Journal of Applied Physics

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Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks J. Appl. Phys. 113, 064501 (2013) Multi-layered dielectric cladding plasmonic microdisk resonator filter and coupler Phys. Plasmas 20, 020701 (2013) Micromachined piezoelectric microphones with in-plane directivity Appl. Phys. Lett. 102, 054109 (2013) Referee acknowledgment for 2012 Biomicrofluidics 7, 010201 (2013) Introducing a well-ordered volume porosity in 3-dimensional gold microcantilevers Appl. Phys. Lett. 102, 053501 (2013) Additional information on J. Appl. Phys. In this work, we describe the gold-coating of silicon microcantilever sensors by pulsed laser deposition (PLD) and their performance as DNA biosensors. To test optimum deposition conditions for coating the sensors, silicon substrates were gold coated by PLD using the fifth harmonic of a Nd:YAG laser (213 nm, pulse duration 15 ns). The gold deposits were characterized by atomic force microscopy and x-ray diffraction. The adequate conditions were selected for coating the sensors with a 20 nm thick gold layer and subsequently functionalized with a selfassembled monolayer of thiolated DNA. To verify PLD as a tool for gold coating of biomechanical sensors, they were characterized by using a scanning laser analyzer platform. Characterization consisted in the measurement of the differential stress of the cantilevers upon hydration forces before and after functionalization with a double-stranded DNA monolayer. The measurements showed that the sensor surface stress induced by the adsorption of water molecules is approximately seven times higher than that of functionalized sensors gold coated by thermal evaporation. These results indicate that gold coating by PLD could be an advantageous method to enhance the response of biomechanical sensors based on gold-thiol chemistry. V C 2012 American Institute of Physics. [http://dx

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Pulsed laser deposition of TiO2: diagnostic of the plume and characterization of nanostructured deposits

Cited by 32 publications

References 20 publications

Ion beam induced chemical and morphological changes in TiO2 films deposited on Si(111) surface by pulsed laser deposition

Ion beam induced chemical and morphological changes in TiO2 films deposited on Si(111) surface by pulsed laser deposition

Heat Treatment in Molecular Precursor Method for Fabricating Metal Oxide Thin Films

Gold coating of micromechanical DNA biosensors by pulsed laser deposition

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