Pulsed magnetron sputtering of chromium boride films from loose powder targets

Audronis, M.; Kelly, Peter; Arnell, R.D.; Valiulis, Algirdas Vaclovas

doi:10.1016/j.surfcoat.2004.11.007

Cited by 52 publications

(34 citation statements)

References 38 publications

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“…They are generally deposited as thin films using magnetron sputtering with TiB 2 as the most widely studied diboride [1][2][3][4][5][6][7], but there are also reports on CrB 2 [8][9][10], ZrB 2 [11][12][13], HfB 2 [14,15], WB 2 [16], and TaB 2 [17]. MeB 2 films are almost exclusively sputtered from compound MeB 2 targets since a reactive process is undesirable considering the toxic nature and explosiveness of B-containing gases.…”

Section: Introductionmentioning

confidence: 99%

Superhard NbB2− thin films deposited by dc magnetron sputtering

Nedfors

Tengstrand

et al. 2014

Surface and Coatings Technology

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We have deposited weakly textured substoichiometric NbB 2−x thin films by magnetron sputtering from an NbB 2 target. The films exhibit superhardness (42 ± 4 GPa), previously only observed in overstoichiometric TiB 2 thin films, and explained by a self-organized nanostructuring, where thin TiB 2 columnar grains hinder nucleation and slip of dislocations and a B-rich tissue phase between the grains prevent grain-boundary sliding. The wide homogeneity range for the NbB 2 phase allows a similar ultra-thin B-rich tissue phase to form between thin (5-10 nm) columnar NbB 2−x grains also for films with a B/Nb atomic ratio of 1.8, as revealed here by analytical aberration-corrected scanning transmission electron microscopy. Furthermore, a coefficient of friction of 0.16 is measured for an NbB 2−x film sliding against stainless steel with a wear rate of 5 × 10 −7 mm 3 /Nm. X-ray photoelectron spectroscopy results suggest that the low friction is due to the formation of a lubricating boric acid film.

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Section: Introductionmentioning

confidence: 99%

Superhard NbB2− thin films deposited by dc magnetron sputtering

Nedfors

Tengstrand

et al. 2014

Surface and Coatings Technology

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“…A great interest is currently focused on the synthesis of metal-boron refractory compounds widely used for their unique properties, such as high melting point, hardness and superconductivity [1][2][3][4]. In view of their properties, it is of significant scientific and practical interest to study the possibility of obtaining metal-boron alloys as thin films.…”

Section: Introductionmentioning

confidence: 99%

Two-phase zirconium boride thin film obtained by ultra-short pulsed laser ablation of a ZrB12 target

Bonis

Santagata

Rau

et al. 2013

Applied Surface Science

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“…However, these properties depend strongly on the deposition process and parameters [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. To understand the relationships between these deposition parameters and the resulting properties requires detailed structural analysis of the films.…”

Section: Introductionmentioning

confidence: 99%

“…To understand the relationships between these deposition parameters and the resulting properties requires detailed structural analysis of the films. This understanding may give important information about the characteristics of the deposition processwhich in this particular case is a recently developed method involving magnetron sputtering of loosely packed powder (LPP) targets [1][2][3][4] -and then point to directions for improvement. The combination of a pulsed magnetron sputtering (PMS) process [5] with the use of blended powder targets is a new, highly flexible deposition tool, suitable for the development of novel physical vapour deposition (PVD) coating systems and the optimisation of film properties.…”

Section: Introductionmentioning

confidence: 99%