Pulsed operation of a high average power Yb:YAG thin-disk multipass amplifier

Schulz, Michael; Riedel, Robert; Willner, A.; Düsterer, S.; Prandolini, M. J.; Feldhaus, J.; Faatz, B.; Roßbach, J.; Drescher, Markus; Tavella, F.

doi:10.1364/oe.20.005038

Cited by 45 publications

(32 citation statements)

References 20 publications

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“…However, novel laser concepts, such as thin-disk 12,13 , innoslab 14 , and fiber lasers 15 , have shown impressive advances in their performance and reached the kilowatt level of average power during pulsed operation. All of these architectures are based on ytterbium-doped laser materials that limit the attainable pulse duration to a few hundred femtoseconds.…”

Section: Introductionmentioning

confidence: 99%

Exploring new avenues in high repetition rate table-top coherent extreme ultraviolet sources

et al. 2015

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The process of high harmonic generation (HHG) enables the development of table-top sources of coherent extreme ultraviolet (XUV) light. Although these are now matured sources, they still mostly rely on bulk laser technology that limits the attainable repetition rate to the low kilohertz regime. Moreover, many of the emerging applications of such light sources (e.g., photoelectron spectroscopy and microscopy, coherent diffractive imaging, or frequency metrology in the XUV spectral region) require an increase in the repetition rate. Ideally, these sources are operated with a multi-MHz repetition rate and deliver a high photon flux simultaneously. So far, this regime has been solely addressed using passive enhancement cavities together with low energy and high repetition rate lasers. Here, a novel route with significantly reduced complexity (omitting the requirement of an external actively stabilized resonator) is demonstrated that achieves the previously mentioned demanding parameters. A krypton-filled Kagome photonic crystal fiber is used for efficient nonlinear compression of 9 mJ, 250 fs pulses leading to ,7 mJ, 31 fs pulses at 10.7 MHz repetition rate. The compressed pulses are used for HHG in a gas jet. Particular attention is devoted to achieving phase-matched (transiently) generation yielding .10 13 photons s -1 (.50 mW) at 27.7 eV. This new spatially coherent XUV source improved the photon flux by four orders of magnitude for direct multi-MHZ experiments, thus demonstrating the considerable potential of this source.

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Section: Introductionmentioning

confidence: 99%

Exploring new avenues in high repetition rate table-top coherent extreme ultraviolet sources

et al. 2015

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“…5. It has been demonstrated that a thin-disc Yb:YAG laser can generate kW level average power with a high repetition rate in burst mode 16 and continuous mode. 17 In the earlier work by the burst mode, a multipass laser amplifier was developed to operate in a 10-Hz burst mode with 800-μs burst duration and 100-kHz intraburst repetition rate.…”

Section: Laser Assistance In Euv Fel Source Technologymentioning

confidence: 99%

kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation

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et al. 2017

J. Micro/Nanolith. MEMS MOEMS

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, "kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation," J. Micro/Nanolith. MEMS MOEMS 16(4), 041011 (2017), doi: 10.1117/1.JMM.16.4.041011. Abstract. The technology for extreme ultraviolet (EUV) lithography sources is maturing. Laser produced plasma (LPP) sources with usable power >100 W have been used in high-volume manufacturing (HVM) applications, and 250-W sources are expected to be introduced in HVM soon. However, a further increase of power and cleanness may benefit a powerful picosecond (ps) laser in the near-infrared and wavelength converted spectral region. The HiLASE Centre has been working in thin-disc laser technology and has demonstrated a 0.5-kW platform Perla-C based on a very compact Yb:YAG regenerative amplifier. 100-kHz ps operation has been achieved with a fundamental spatial mode and excellent long-term pointing and energy stability. It is reported on a thin-disc-based ps Yb:YAG solid-state laser technology platform Perla developed in the Czech Republic and the present performance of delivering >4 mJ, <2-ps pulses at a 100-kHz repetition rate with the potential to be upgraded to 1 kW of average power and 1-MHz pulse repetition rate. The ps laser extendibility is important for kW-class LPP sources and controlled free electron laser EUV sources in 10-kW power region. © The Authors.Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI. IntroductionExtreme ultraviolet (EUV) lithography is taking off from a long technology development phase to high-volume manufacturing (HVM) in major semiconductor companies. Laser produced plasma (LPP) is the selected method for the required 13.5-nm source for its advantages of scalable output power, narrow spectrum, small source size, and cleanness. The source technology is already fairly advanced in each component level for a 250-W power supply. The next step for extension to the finer line width as a 3-nm node and beyond is based on a high NA imaging system, which requires a further increase of EUV source power to the kW level. A conceptual study based on the present LPP technology on a possible path to the realization of a kW 13.5-nm tin EUV source was reported. 1 There are several key technologies in the LPP source for high average power, and conditioning of the injected micro tin droplet into the mist target is critical for realizing higher conversion efficiency (CE) of up to 6% and full ionization for efficient exhaust in a magnetic field. It was experimentally demonstrated that the resulting mist shape is dependent on the initial laser pulses, and a picosecond (ps) laser can produce a lower density mist distribution rather than nanosecond (ns) pulses. The background physics of this phenomenon is under intensive physical and experimental study.2,3 The typical repetition rate of the droplet generation is 100 kHz, and a further increase is necessary to kW generation due to t...

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“…A 15-pass amplifier was presented based on a thin-disk to amplify a 10-Hz burst of 80 pulses at 100 kHz repetition rate with 25 mJ per pulse. 104 Recent progress in large-pitch photonic crystal fibers has allowed the increase of pulse energy in fiber amplifier systems to impressive levels. CPA systems based on such fibers have been already used as OPCPA pump with up to 200 W average power resulting in the current record OPCPA average power.…”

Section: Flashlamp-pumped and Diode-pumpedmentioning

confidence: 99%

Concepts, performance review, and prospects of table-top, few-cycle optical parametric chirped-pulse amplification

et al. 2013

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Abstract. More than 20 years after the first presentation of optical parametric chirped-pulse amplification (OPCPA), the technology has matured as a powerful technique to produce high-intensity, few-cycle, and ultrashort laser pulses. The output characteristics of these systems cover a wide range of center wavelengths, pulse energies, and average powers. The current record performance of table-top, few-cycle OPCPA systems are 16 TW peak power and 22 W average power, which show that OPCPA is able to directly compete with Ti:sapphire chirped-pulse amplification-based systems as source for intense optical pulses. Here, we review the concepts of OPCPA and present the current state-of-the art performance level for several systems reported in the literature. To date, the performance of these systems is most generally limited by the employed pump laser. Thus, we present a comprehensive review on the recent progress in high-energy, high-average-power, picosecond laser systems, which provide improved performance relative to OPCPA pump lasers employed to date. From here, the impact of these novel pump lasers on table-top, few-cycle OPCPA is detailed and the prospects for next-generation OPCPA systems are discussed.

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Pulsed operation of a high average power Yb:YAG thin-disk multipass amplifier

Cited by 45 publications

References 20 publications

Exploring new avenues in high repetition rate table-top coherent extreme ultraviolet sources

Exploring new avenues in high repetition rate table-top coherent extreme ultraviolet sources

kW-class picosecond thin-disc prepulse laser Perla for efficient EUV generation

Concepts, performance review, and prospects of table-top, few-cycle optical parametric chirped-pulse amplification

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