Pulsed power magnetron sputtering of a niobium target in reactive oxygen and/or nitrogen atmosphere

Fenker, M.; Kappl, H.; Petrikowski, K.; Bretzler, Rita

doi:10.1016/j.surfcoat.2005.08.074

Cited by 20 publications

(13 citation statements)

References 13 publications

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“…At room temperature, H varies between 10.5 and 13.5 GPa, depending on the amount of oxygen present in the coatings. The coating with the lowest oxygen content exhibits the highest hardness value and the one with highest oxygen content exhibits the lowest hardness value, in agreement with the previous works from the authors [4]. After annealing at 400°C an evolution of the hardness is observed, namely, for α = 0.3, it increased from 13.5 to 16.5 GPa, and for the other two coatings, it suffers a drop to a value close to 9 GPa.…”

Section: Mechanical Propertiessupporting

confidence: 91%

“…Beneath patents, e.g. [3], and publications from the authors [4,5], only one paper was found where NbON is applied as a CrON/NbON multilayer topcoat to increase the corrosion resistance of CrN/NbN-coated high speed steel [6].…”

Section: Introductionmentioning

confidence: 99%

“…In a former study on the Nb-O-N system [4], we reported on the pulsed power reactive magnetron sputtering of Nb, Nb-O and Nb-O-N thin films. In two further studies [1,5] we published results on the deposition of niobium oxynitride coatings using reactive magnetron sputtering in direct current (DC) and pulsed modes, where their properties such as chemical composition, morphology, crystallographic structure, electrical and optical behaviors, mechanical properties, thermal stability (in vacuum), corrosion and degradation behavior have been studied.…”

Section: Introductionmentioning

confidence: 99%

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Influence of air oxidation on the properties of decorative NbOxNy coatings prepared by reactive gas pulsing

Chappé¹,

Carvalho²,

Lanceros-Méndez³

et al. 2008

Surface and Coatings Technology

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In this work the oxidation resistance of DC reactive sputtered niobium oxynitrides and its influence on the properties of the films are studied. The depositions have been carried out by DC magnetron sputtering with a reactive gas pulsing process. The nitrogen flow was kept constant and the oxygen flow was pulsed. Pulse durations of 10 s produced multilayer coatings with a period of λ = 10 nm. Three sets of films with increasing duty cycle (= on-time of high oxygen flow / pulse duration) have been deposited. The films were subsequently annealed in air at 400, 500 and 600°C, respectively. X-ray diffraction measurements showed a clear and progressive change from a roughly amorphous nature of the films to a crystalline oxidetype compound for those annealed at 600°C, which was consistent with the composition analysis. For annealing temperatures of 500 and 600°C, the coatings presented a significant reduction in hardness, approaching the values characteristic of Nb 2 O 5 -type films. Moreover, the residual stress measurements performed by using the deflection method revealed low values in all the coatings nearly independent on the annealing temperature.Color variation in the CIE − L ⁎ a ⁎ b ⁎ color space and the reflectance in the UV-visible spectrum range of these niobium oxynitrides were investigated and correlated to their chemical composition and structural features. For both properties, the variation tendencies are quite similar, showing the transition from a nitride-type alloy to an oxide-type one with increasing annealing temperature.

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Section: Mechanical Propertiessupporting

confidence: 91%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Influence of air oxidation on the properties of decorative NbOxNy coatings prepared by reactive gas pulsing

Chappé¹,

Carvalho²,

Lanceros-Méndez³

et al. 2008

Surface and Coatings Technology

Self Cite

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“…Optical coatings with gradient refractive index layers are one of the most promising solutions for optical filters [2] and omnidirectional antireflective coatings [3,4]. Nevertheless, oxide [5,6] and oxynitride [7,8,9,10] materials with their hardness, chemical stability, resistance to oxidation and colour degradation, and tuneable optical properties could also be excellent candidates for protective optical films. The nitride or carbonitride coatings currently used in this field exhibit only a limited colour spectrum.…”

Section: Introductionmentioning

confidence: 99%

Nanoscale colour control: W–O graded coatings deposited by magnetron sputtering

et al. 2008

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Abstract.A new design of decorative tungsten oxide coatings is presented. The coatings were deposited with gradient refraction index by magnetron sputtering from a tungsten target and pulsing the reactive gas. The controlled injection of the reactive gas can produce a gradient concentration profile from pure tungsten to tungsten trioxide determining the final apparent colour of the coating. A dynamic sputtering model was built to simulate the coating growth during the reactive gas pulsing which was validated by the direct measurement of the oxygen content gradient in the deposited coatings. Finally these results were used for an optical model allowing describing the optical properties of the deposited tungsten oxide layer, again validated by experimental analysis. This procedure allows depositing coatings with a desired colour by using the models for finding the optimal oxygen pulse parameters. This proposed method can be easily applied to almost any metal/metal oxide system.

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“…But there are also several examples where two reactive gases are introduced in the vacuum chamber during deposition, e.g. oxygen and nitrogen for oxynitride coatings (CrON [6], FeON [7], NbON [8,9], SiON [10], TaON [11], TiON [12], WON [13], ZrON [14]) and acetylene (or methane) and nitrogen for carbonitride coatings (TiCN [15], ZrCN [16]). The reactive magnetron sputtering using one or two reactive gases is accompanied by some difficulties, these are: a) poisoning of the target material by contamination with the reactive gas (e.g.…”

Section: Introductionmentioning

confidence: 99%

Precise control of multilayered structures of Nb–O–N thin films by the use of reactive gas pulsing process in DC magnetron sputtering

Fenker

Kappl

Sandu

2008

Surface and Coatings Technology

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Pulsed power magnetron sputtering of a niobium target in reactive oxygen and/or nitrogen atmosphere

Cited by 20 publications

References 13 publications

Influence of air oxidation on the properties of decorative NbOxNy coatings prepared by reactive gas pulsing

Influence of air oxidation on the properties of decorative NbOxNy coatings prepared by reactive gas pulsing

Nanoscale colour control: W–O graded coatings deposited by magnetron sputtering

Precise control of multilayered structures of Nb–O–N thin films by the use of reactive gas pulsing process in DC magnetron sputtering

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