2007
DOI: 10.1088/0963-0252/16/2/002
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Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon

Abstract: The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56 MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 µs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 µs) result in a filamentary discharge while long pulse periods (greater than … Show more

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Cited by 176 publications
(115 citation statements)
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“…9 Dielectric barrier discharges working with either sinusoidal signals around 10-100 kHz, where the dielectric prevents the formation of the high temperature arcs, are the most common atmospheric pressure system currently in use. 10 In this particular plasma source, the diameter of quartz capillary ͑and consequently, interelectrode gap͒ was reduced in order to obtain stable plasma with long afterglow zone. Commonly used technique for atmospheric pressure discharges investigations is optical emission spectroscopy ͑OES͒.…”
Section: Introductionmentioning
confidence: 99%
“…9 Dielectric barrier discharges working with either sinusoidal signals around 10-100 kHz, where the dielectric prevents the formation of the high temperature arcs, are the most common atmospheric pressure system currently in use. 10 In this particular plasma source, the diameter of quartz capillary ͑and consequently, interelectrode gap͒ was reduced in order to obtain stable plasma with long afterglow zone. Commonly used technique for atmospheric pressure discharges investigations is optical emission spectroscopy ͑OES͒.…”
Section: Introductionmentioning
confidence: 99%
“…Self-organized structures appear in numerous gases and in a wide parameter range. They become investigated in low frequency devices as well as in radio frequency discharges [1,4]. Besides the pattern formation itself, their temporal dynamic has been investigated in the past [6,10,11,13].…”
Section: Introductionmentioning
confidence: 99%
“…The spectral line emitted from plasma is subject to various broadening mechanisms except instrumental broadening, such as natural, Doppler, resonance, van der Waals, and Stark broadening. The natural (6.2 × 10 −5 nm [21]), resonance, and van der Waals broadening are generally negligible in low-pressure plasma. Doppler broadening � Doppler 1/2 follows Gaussian profile, the same as instrumental broadening.…”
Section: Oes Systemmentioning
confidence: 99%