radical-based chemistry generally dominates in any eventual material processing in the plasma jet.The CH radical is a common intermediate in reactive chemical systems with hydrocarbons [6]. Monitoring CH provides an insight into the reaction mechanism. CH radicals and C atoms contribute to the experimentally observed high and nonuniform diamond growth rates in the highpower Bristol reactor [7]. The level of CH concentration agreement between the model prediction and the experimental measurement can be used to test model predictions of hydrocarbon chemistry [8]. CH also is a probe species to determine the chemical erosion of carbon-based materials in divertor [9].Optical emission spectroscopy (OES) is arguably the simplest and most straightforward means to investigate the CH behavior in the plasma. The OES signal is proportional to the population density of the upper state, and the interpretation of OES data is complicated which needs a proper understanding of the various species excitation and de-excitation processes, especially when the plasma does not close to local thermodynamic equilibrium (LTE). Generally, the ground electronic state radicals and molecules are inevitably present in higher concentrations than their electronically excited counterparts and dominate the thin film deposition [10]. Thus, it is necessary to measure the majority species populating ground and low-lying electronic states.To diagnose the ground state, absorption spectroscopy is a preferred approach. Cavity ring-down spectroscopy (CRDS) [11] provides the diagnostic of choice to obtain the absolute number densities without the need for additional calibration standards. The technique measures the time decay of a laser pulse trapped in a high-finesse optical cavity. Effectively, it is a multi-pass technique in which the optical path length may be tens of kilometers. Thus, it is a versatile, highly sensitive, linear absorption technique.Abstract A combination of optical emission spectroscopy (OES) and cavity ring-down spectroscopy (CRDS) has enabled to determinate the number densities of CH(A 2 Δ) and CH(X 2 Π) radicals simultaneously in a cascaded arc plasma reactor operating with a CH 4 /Ar mixture. It is found that the number density of CH(A 2 Δ) radical increases with discharge current at first and then decreases. However, the number density of CH(X 2 Π) radical decreases with discharge current when the rate of CH 4 flow to total flow is lower than 1 %, while it increases slightly with discharge current when the rate is 1.5 %. The results reveal that CH radicals are deviation from excitation equilibrium. Although OES is the simplest and most straightforward means to investigate the CH radical behavior, it is not enough to provide the information of the CH(X 2 Π) number density, and additional methods, such as CRDS, are needed in the cascaded arc plasma jet.