Pure Silica Zeolite Films as Low-k Dielectrics by Spin-On of Nanoparticle Suspensions

Wang, Z. B.; Mitra, Arindam; Wang, H. T.; Huang, Limin; Yan, Yushan

doi:10.1002/1521-4095(200110)13:19<1463::aid-adma1463>3.0.co;2-h

Cited by 199 publications

(193 citation statements)

References 2 publications

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“…38,39 The first step is preparation of micropatterned monolayers of functional groups on substrates using microcontact printing 5 or photopatterning. 10,22 Figure 16a illustrates a microcontact printing-based procedure.…”

Section: Patterned Monolayer Assemblymentioning

confidence: 99%

Organization of Zeolite Microcrystals for Production of Functional Materials

2006

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This Account summarizes various methods of organizing zeolite microcrystals into two-dimensional functional entities such as monolayers, multilayers, and patterned monolayers on various substrates and three-dimensional functional entities such as microballs and protein-zeolite composite fibrils. In the case of monolayer assembly, various types of linkages and substrates, factors that govern the rate, degree of coverage, degree of close packing, degree of uniform orientation, and average binding strength between each crystal and the substrate are described. The current and future applications of the organized products are also discussed.

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Section: Patterned Monolayer Assemblymentioning

confidence: 99%

Organization of Zeolite Microcrystals for Production of Functional Materials

2006

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“…It is believed that the amorphous silica is beneficial for reducing the surface roughness of the film and for establishing strong adhesion of the film to the substrate. [11,12] The spin-on MFI film from this nanoparticle suspension consists of zeolite nanocrystals embedded in an amorphous silica matrix. To quantify the yield of the nanoparticle suspension, the following protocol is devised.…”

Section: Introductionmentioning

confidence: 99%

Effects of Crystallinity in Spin‐On Pure‐Silica‐Zeolite MFI Low‐Dielectric‐Constant Films

Luo

et al. 2004

Adv Funct Materials

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Low‐dielectric‐constant (low‐κ) materials are a critical requirement for future generations of computer microprocessors. As a unique class of porous silicas, pure silica zeolites (PSZs) have been shown to be a promising low‐κ material with excellent mechanical strength (e.g., elastic modulus of 16–18 GPa) due to their crystalline nature. In the present study, we show for the first time that higher crystallinity of spin‐on PSZ MFI films leads to lower κ values and less moisture sensitivity—two critical properties of a porous low‐κ material. We have also advanced the two‐stage synthesis method to produce zeolite nanoparticles with high yield (77 %) and a small diameter (< 80 nm). A κ value of 1.6 is obtained from the silylated highly crystalline PSZ MFI film and the κ value only increases by 12.5 % after exposure to ambient conditions for a period of 24 h.

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“…This second silicalite growth can be avoided by using an amorphous silica containing silicalite nanocrystals solution. Here, the mesopore size is reduced from 17 to 2.3-2.6 nm, resulting in a film with better mechanical properties (E = 16-18 GPa by nanoindentation) and a dielectric constant of 2.3 [137]. Positronium annihilation fifetime spectroscopy (PALS) was used in this case to confirm the presence of micropores (0.55 nm) due to the zeolite framework, in addition to open/interconnected mesopores (2.3-2.6 nm) [138].…”

Section: Silica Zeolitesmentioning

confidence: 99%