Boron (B) is one of the most problematic impurities to remove from metallurgical grade silicon in the production of more pure solar grade silicon (SoG-Si). In the present work, recent progresses in the application of reactive gases for B removal from molten silicon is reviewed. Moreover, in order to clarify the mechanisms and kinetics of gas-based B-refining, an experimental procedure using humidified Ar, N 2 , and H 2 gases applied to boron-doped silicon melt is described. It is shown that the kinetics and extent of B removal is depending on the type of humidified gas. The thermodynamics and kinetics of B removal from molten silicon are studied to explain experimental observations. The mass transfer coefficients of B are calculated and possible mechanisms for B removal by the reactive gases are proposed:It is shown that the lower equilibrium partial pressure of HBO gas at higher temperatures causes slower B removal rate.