2012
DOI: 10.1039/c1ja10241a
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Push-broom hyperspectral imaging for elemental mapping with glow discharge optical emission spectrometry

Abstract: Glow discharge optical emission spectroscopy (GDOES) has been recognized for allowing direct solid sample elemental analysis with high depth resolution. However, the lateral resolution it affords has been historically restricted to some millimetres or the diameter of the sputtered area. Recently, it was shown that one can obtain laterally resolved information from within the sputtered area by operating the discharge in pulsed power mode. The newly available data dimensions require a new approach to the collect… Show more

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Cited by 24 publications
(34 citation statements)
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“…An additional point of comparison is the filter bandpass (∼3 nm), considerably larger than typical for the monochromatic imaging spectrometer 6 (∼1 nm), the acousto-optical spectrometer (<0.3 nm), 9 and the push-broom spectrometer (∼0.5 nm). 10…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…An additional point of comparison is the filter bandpass (∼3 nm), considerably larger than typical for the monochromatic imaging spectrometer 6 (∼1 nm), the acousto-optical spectrometer (<0.3 nm), 9 and the push-broom spectrometer (∼0.5 nm). 10…”
Section: Resultsmentioning
confidence: 99%
“…Accordingly, the latter two techniques are superior for imaging glow-discharge surfaces, in part because they boast high optical throughput. 9,10 The tilting-filter instrument described here further addresses this problem and with less instrumental complexity.…”
Section: Introductionmentioning
confidence: 99%
“…EMCCD, CCD, etc.) or instruments capable of scanning an image across the entrance slit of a spectrometer [27]. Of course, if a single compromise spatial window were utilized, the method could be more readily expanded to instruments with single-channel detectors (such as a photomultiplier tube) or linear detector arrays.…”
Section: Compromise Window Spatial Selectionmentioning
confidence: 99%
“…At these large dimensions, evolved topography would be smoothed at the transition between adjacent materials; experimental evidence is given later. Relatively large surface heterogeneities are most relevant to glow discharge surfaceimaging techniques [17][18][19][20] , which typically offer spatial resolution on the scale of hundreds of micrometers. Finally, there is no guarantee that plasma conditions will be consistent during elemental analysis of a sample by imaging GD spectrometry.…”
Section: Program To Model Gd Sputtering Of Heterogeneous Materialsmentioning
confidence: 99%
“…Over the past decade, several optical techniques have been developed to view spatially resolved emission across the surface of glow discharge samples. [17][18][19][20] These techniques utilize pulsed glow discharges in 0.1 to 4.0 kPa of argon to temporally and spatially isolate emitting species near where they were sputtered from the surface. Higher pressures shrink the mean free path, which limits the lateral diffusion of atoms in the time between their removal from a sample surface and emission they yield in the negative glow region of the discharge.…”
Section: Introductionmentioning
confidence: 99%