Proceedings of the Materials for Sustainable Development Conference (MAT-SUS) 2022
DOI: 10.29363/nanoge.nfm.2022.182
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PVD of thin-film solid-state electrolytes: a study on the lithium rich oxychloride antiperovskite

Nicolas Osenciat
1
,
Abdessalem Aribia
2
,
Moritz H. Futscher
3
et al.
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