PWM as a Low Cost Method for the Analog Control of MEMS Devices

Pollock, Corey; Barrett, Lawrence; Corro, Pablo G. del; Stange, Alexander; Bifano, Thomas G.; Bishop, David J.

doi:10.1109/jmems.2019.2891205

Cited by 7 publications

(4 citation statements)

References 48 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Both platforms enable control of static position, oscillation amplitude, frequency, phase, and detection. The drive parameters are controlled via a built-in electrostatic self-test feature on the ADXL 203 platform, which can be used for analog control of the microobjects via pulsed width modulation 34 . This feature is also used to calibrate and negate the effect of an anticipated electrostatic coupling between the plate and sphere, as has been shown previously 5 .…”

Section: Mems Casimir Gradiometer Designmentioning

confidence: 99%

“…Measurement is achieved by detecting an oscillating force on the permanent magnet at resonance, where the force is proportional to a gradient magnetic field. Both resonators can also be electrostatically driven in an analog environment 5,27,34 . In essence, these two systems, on the same central axis and within 100 nm of separation, form a Casimir-coupled resonator.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry

et al. 2021

Self Cite

View full text Add to dashboard Cite

The Casimir force, a quantum mechanical effect, has been observed in several microelectromechanical system (MEMS) platforms. Due to its extreme sensitivity to the separation of two objects, the Casimir force has been proposed as an excellent avenue for quantum metrology. Practical application, however, is challenging due to attractive forces leading to stiction and device failure, called Casimir pull-in. In this work, we design and simulate a Casimir-driven metrology platform, where a time-delay-based parametric amplification technique is developed to achieve a steady-state and avoid pull-in. We apply the design to the detection of weak, low-frequency, gradient magnetic fields similar to those emanating from ionic currents in the heart and brain. Simulation parameters are selected from recent experimental platforms developed for Casimir metrology and magnetic gradiometry, both on MEMS platforms. While a MEMS offers many advantages to such an application, the detected signal must typically be at the resonant frequency of the device, with diminished sensitivity in the low frequency regime of biomagnetic fields. Using a Casimir-driven parametric amplifier, we report a 10,000-fold improvement in the best-case resolution of MEMS single-point gradiometers, with a maximum sensitivity of 6 Hz/(pT/cm) at 1 Hz. Further development of the proposed design has the potential to revolutionize metrology and may specifically enable the unshielded monitoring of biomagnetic fields in ambient conditions.

show abstract

Section: Mems Casimir Gradiometer Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry

et al. 2021

Self Cite

View full text Add to dashboard Cite

show abstract

“…This approach has been introduced for single actuators before, most recently by Pollock et.al. 2 We extend this approach to demonstrate that multi-channel PWM drivers can be adapted to electrostatically actuator arrays without noticeable crosstalk issues, enabling higher driving voltages and thus substantial increase in correction capability.…”

Section: Introductionmentioning

confidence: 99%

Driving and control of an optofluidic wavefront modulator through pulse width modulation

Wessels,

Ataman

2024

MOEMS and Miniaturized Systems XXIII

View full text Add to dashboard Cite

The performance of any adaptive optics system is largely determined by the strength and number of actuators of the corrective element. Deformable phase plate (DPP) technology, recently developed by our group, allows for high order aberration correction in transmission, as it features a large number of transparent electrostatic actuators across the optical aperture. However, DPPs require high operating voltages to provide competitive stroke, which is currently provided by costly analog amplifiers. Pulse width modulation (PWM) offers a viable alternative to obtain analog operation at higher voltages without the need for analog amplifiers. It also potentially expands the library of optical liquids that can be used, as it is compatible with polar liquids acting as the dielectric. In this study we discuss the design, implementation and testing of an 8-channel PWM driver, which has 50 kHz maximum modulation frequency and 600 V maximum drive voltage. A DPP variant designed to correct radial symmetric aberration is used to evaluate the performance of the manufactured PWM driver in terms of maximum deflection, stability, precision and crosstalk between actuators. Furthermore, we also demonstrate that PWM driving allows the use of polar liquids for the DPP technology, widening the library of possible optical liquids for this technology.

show abstract

“…A previous set of papers [6], [16]- [18] have discussed the galvo behavior of a MEMS device and shown how it can have essentially perfect step and settle behavior. We will briefly summarize those results here.…”

Section: Introductionmentioning

confidence: 99%

Feedforward Control Algorithms for MEMS Galvos and Scanners

Barrett

Imboden²,

Javor

et al. 2021

J. Microelectromech. Syst.

Self Cite

View full text Add to dashboard Cite

Optical systems typically use galvanometers (galvos) and scanners. Galvos move, quasi-statically, from one static position to another. Scanners move in an oscillatory fashion, typically at the device resonant frequency. MEMS devices, which have many advantages and are often used in optical systems, are typically high Q devices. Moving from one position to another for a galvo or one amplitude to another for scanners, can take many periods to settle following the ring down. During these transitions, the optical system is inactive. Here, we show how precisely timed pulses can be used (in an open loop manner) to begin or end scanner motion without ring up/ring down time. The size of pulse required is found to depend on the Q of the device, and relationships are derived. The pulse can also be separated into multiple pulse spaced one period apart if pulses of the necessary size are not possible due to constraints of the physical device. For finite Q scanners, the amplitude decreases after the initial pulse due to damping. This can be eliminated by applying an excitation at the frequency of the scanner. The necessary amplitude for this excitation is derived. Finally, by combining this open loop control algorithm with an open loop control algorithm for galvo motion the device can seamlessly move between scanner and galvo functioning. These control algorithms are demonstrated using computer simulations, analytical models and a commercially available MEMS mirror (Mirrorcle Technologies, A8L2.2).[2020-0238]

show abstract

PWM as a Low Cost Method for the Analog Control of MEMS Devices

Cited by 7 publications

References 48 publications

Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry

Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry

Driving and control of an optofluidic wavefront modulator through pulse width modulation

Feedforward Control Algorithms for MEMS Galvos and Scanners

Contact Info

Product

Resources

About