PZT Acoustic Energy Harvester Arrays with Dual Top Electrodes

Abstract

This paper presents the power generation performances of an array of three microelectromechanical system (MEMS) acoustic energy harvesters equiped with lead–zirconate–titanate (PZT) capacitors. The PZT acoustic energy harvesters had a diaphragm with a diameter of 2 mm consisting of Al (0.1 μm) / PZT (1 μm) / Pt (0.1 μm) / Ti (0.1 μm) / SiO2 (1.5 μm), and the diaphragm vibrations were excited by sound pressure. The arrayed peripheral energy harvester generated a maximum power of 2.26 × 10-10 W at a sound pressure level (SPL) of 100 dB at 5 kHz. The output power of three arraying devices was about 3 times larger than that of the single devices.