PZT‐based Thick Films and the Development of a Piezoelectric Pressure Sensor

Abstract

A study has been carried out on the relationship between the composition, poling condition and piezoelectric properties of thick film layers. Pastes based on lead‐titanate‐zirconate (PZT) powders, with either PbO or a lead‐alumina‐silicate glass frit as binder, were prepared. Microstructure, electrical and mechanical properties were analysed. Processing and poling conditions modify these properties; then a wide latitude of opportunities is offered in the choice of ferroelectric/piezoelectric characteristics of the layers used as sensing elements for sensors. A pressure sensor was realised where a circular diaphragm of alumina supports two piezoelectric layers obtained by screen printing and firing a PZT/PbO‐based ferroelectric paste. The design and the performance characteristics are described.

Processing and Properties of Screen‐Printed Lead Zirconate Titanate Piezoelectric Thick Films on Electroded Silicon

“…In recent years, there has been increasing interest in PZT thick-film technology 1 for applications that combine device performance requirements approaching those of bulk piezoelectrics with the miniature size scale and possibility for direct integration into electronic packages of piezoelectric thin films. Previously reported device applications for PZT thick films include gas and humidity sensors, 2,3 torque and pressure sensors, 4,5 pyroelectric arrays, 6 buzzers, 7 and micropumps. 8 With typical thickness in the range 5-100 m, screen-printed PZT thick films effectively fill the technological gap between thin films and bulk ceramics.…”

Piezoelectric Pressure Sensor Based on Enhanced Thin-Film PZT Diaphragm Containing Nanocrystalline Powders

“…This PZT pressure sensor can be applied to on-line monitoring the pressure in the mold's core and cavity during injection process. Morten et al [65] presented the study on the relationship between the composition, poling condition and piezoelectric properties of thick film layers. Microstructure, electrical and mechanical properties were analyzed.…”

Aerosol techniques for manufacturing piezoelectric materials

“…However, the surface roughness and the density of the films are poor. PZT thick films fabricated by the screen-printing method [19,20] have a low density and PZT/Pt/Si structures can be damaged because of the long firing time at temperatures higher than 800 °C. An improved screen-printing method with a low-temperature sintering and a high-resistance electrode has been reported, [21] but the piezoelectric properties of films produced by this method were not reported.…”