Quad-seesaw-electrode type 3-axis tactile sensor with low nonlinearities and low cross-axis sensitivities

Hata, Yoshiyuki; Nonomura, Yutaka; Omura, Y.; Nakayama, Takahiro; Fujiyoshi, Masato; Funabashi, Hirofumi; Akashi, T.; Muroyama, Masanori; Tanaka, Shuji

doi:10.1016/j.sna.2017.09.015

Cited by 15 publications

(9 citation statements)

References 18 publications

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“…Figure 18 shows an image of a triaxial tactile sensor chip, in which an MEMS sensor element is mounted on the nerve‐net chip and integrated into the sensor chip. The sensor chip is mounted on a serial line [35–50]. The cross‐sectional structure of the tactile sensor chip integrated with the nerve‐net chip is shown in Fig.…”

Section: Sensors For Robotsmentioning

confidence: 99%

Sensor Technologies for Automobiles and Robots

Nonomura

2020

IEEJ Transactions Elec Engng

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This paper reviews various sensor technologies with application in automobiles and robots. Several automotive sensors have been developed using the micro‐electromechanical systems (MEMS) technology. The technologies related to combustion pressure sensors, yaw rate sensors, acceleration sensors, and optical scanners are described here. The combustion pressure sensors are used for engine control, while the yaw rate sensors of quartz and silicon crystals and the acceleration sensors are applied for vehicle motion control. Optical scanners are developed for autonomous driving. Several automotive sensors have been significantly reduced in size and cost, and their performance has been improved dramatically by MEMS technology. The inertial force‐sensing system with yaw rate and acceleration sensors enabled the assistant and partner robots to stand on two legs, walk, or invert and move on two wheels. Because the robots are required to have a variety of sensors, a nerve‐net sensing system was developed. This sensing system has three layers: the host, relay, and sensor nodes. The sensor node is a special large‐scale integration called a ‘nerve‐net chip.’ A triaxial force tactile sensor integrated with the nerve‐net chip was developed as a 2.8‐mm square surface‐mountable chip. A force and thermal tactile sensor was also developed, which detected heat flows and discriminated the materials of contacted objects. The heat flow sensor was thinned with thin‐film technology. The sensor technologies will be used for eco cars and autonomous vehicles. Next‐generation robots are also supported by several automotive sensor technologies. © 2020 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

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Section: Sensors For Robotsmentioning

confidence: 99%

Sensor Technologies for Automobiles and Robots

Nonomura

2020

IEEJ Transactions Elec Engng

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“…In addition to this, the MFT is adopted to achieve the high resolution. Different from the most-used micro comb array structures in capacitive force sensors [20,21,22], we applied a teeter-totter structure [29,30,31] for the lateral force detections. Although the capacitive force sensors utilizing differential comb structures have been reported to reach high resolution in nanonewtons, it is lack of sturdiness.…”

Section: Design Principlesmentioning

confidence: 99%

“…The teeter-totter structure is widely used in projectors as micro-mirrors [32] and in robots as tactile sensors [30], for that its symmetric structure is beneficial for the applications in the differential capacitance measurement. As can be seen from Figure 3d, two capacitors are formed between the mover plate and the two electrodes on the fixed base, respectively.…”

Section: Design Principlesmentioning

confidence: 99%

A Hybrid Two-Axis Force Sensor for the Mesoscopic Structural Superlubricity Studies

Sun

et al. 2019

Sensors

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Structural superlubricity (SSL) is a state of nearly zero friction and zero wear between two directly contacted solid surfaces. Recently, SSL was achieved in mesoscale and thus opened the SSL technology which promises great applications in Micro-electromechanical Systems (MEMS), sensors, storage technologies, etc. However, load issues in current mesoscale SSL studies are still not clear. The great challenge is to simultaneously measure both the ultralow shear forces and the much larger normal forces, although the widely used frictional force microscopes (FFM) and micro tribometers can satisfy the shear forces and normal forces requirements, respectively. Here we propose a hybrid two-axis force sensor that can well fill the blank between the capabilities of FFM and micro tribometers for the mesoscopic SSL studies. The proposed sensor can afford 1mN normal load with 10 nN lateral resolution. Moreover, the probe of the sensor is designed at the edge of the structure for the convenience of real-time optical observation. Calibrations and preliminary experiments are conducted to validate the performance of the design.

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“…The LSI with the TSVs were integrated with a fully differential 3-axis tactile sensor manufactured by Toyota Central R&D Labs. (9) The TSV-on-MPW technology (10) is useful for other applications. It is basically open to other customers except direct competitors, although Toyota Group made significant contributions to this R&D. This is mainly because we want to establish the supply chain of this technology, but it is impossible without Toyota Group's understanding of Open Collaboration.…”

Section: Technical Overviewmentioning

confidence: 99%

“…(Color online) Integrated tactile sensor using sensor platform LSI with TSVs. (9,10) Sensors and Materials, Vol. 30, No.…”

Section: Acknowledgmentsmentioning

confidence: 99%

Faster and More Cost-Effective Way to Success in MEMS R&D by Open Collaboration in Tohoku University

2018

Sensors and Materials

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In this paper, "Open Collaboration" is defined as research and development (R&D) in a value/supply chain composed of different organizations including companies, universities and research institutes. If Open Collaboration is defined like this, it is not new, but it was not working well in Japanese universities. This paper first explains the scheme of Open Collaboration of micro-electromechanical systems (MEMS) in Tohoku University. Then, the project of integrated tactile sensors is described as a successful example of Open Collaboration. The purpose of this paper is to promote Open Collaboration in the field of MEMS by introducing our practices.

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Quad-seesaw-electrode type 3-axis tactile sensor with low nonlinearities and low cross-axis sensitivities

Cited by 15 publications

References 18 publications

Sensor Technologies for Automobiles and Robots

Sensor Technologies for Automobiles and Robots

A Hybrid Two-Axis Force Sensor for the Mesoscopic Structural Superlubricity Studies

Faster and More Cost-Effective Way to Success in MEMS R&D by Open Collaboration in Tohoku University

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