Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

Tatar, Erdinc; Alper, Said Emre; Akın, Tayfun

doi:10.1109/jmems.2012.2189356

Cited by 138 publications

(53 citation statements)

References 9 publications

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“…On the contrary, the latter generally compensates mechanical anomalies (see e.g. the well-known Tatar compensation scheme in gyroscopes, [40]). There could be actually a third option for offset compensation, which is chopping of the stators voltage.…”

Section: Offset Sources and Compensationmentioning

confidence: 99%

A 3-D Micromechanical Multi-Loop Magnetometer Driven Off-Resonance by an On-Chip Resonator

Laghi

Marra

Minotti

et al. 2016

J. Microelectromech. Syst.

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Abstract-The work presents the principle and the complete characterization of a single-chip unit formed by MEMS magnetometers to sense the 3D magnetic field vector, and a Tang resonator. The three sensors, nominally with the same resonance frequency, are operated 200 Hz off-resonance through an AC current whose reference frequency is provided by the resonator, embedded in an oscillating circuit. The sensors gain is increased by adopting a current recirculation strategy using metal strips directly deposited on the structural polysilicon. At a driving value of 100 µArms flowing in series through the three devices, the magnetometers show a sub 185 nT/ √ Hz resolution with a selectable bandwidth up to 50 Hz. Over a ± 5 mT full-scale range, the sensitivity curves show linearity errors lower than 0.2%, with high cross-axis rejection and immunity to external accelerations. Under temperature changes, stability of the 200-Hz difference between the magnetometers and the resonator frequency is within 55 ppm/K. Offset is trimmed down to the µT range, with an overall measured Allan stability of about 100 nT at 20 s observation time.

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Section: Offset Sources and Compensationmentioning

confidence: 99%

A 3-D Micromechanical Multi-Loop Magnetometer Driven Off-Resonance by an On-Chip Resonator

Laghi

Marra

Minotti

et al. 2016

J. Microelectromech. Syst.

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show abstract

“…This over-simplified model can be obtained by replacing s=0 in (9). Using this over-simplified model is a common method used in the literature [8], but this method results in errors, if the frequency separation between the drive and sense modes is comparable with the cut-off frequency of the low pass filter used in the demodulation.…”

Section: B Force-feedback Controllermentioning

confidence: 99%

“…Lower frequency separation is desired for larger sensitivity, therefore for high performance systems mismatch amount should be reduced as low as possible [8]. The best condition for operation is 0 Hz frequency separation, which is called the matched condition.…”

Section: B Force-feedback Controllermentioning

confidence: 99%

“…There are also over-simplified methods that model the second order system dynamics as a simple gain stage. Nevertheless, they result in errors in the controller designs for gyroscopes a with low frequency separation between the sense and drive resonance modes [8].…”

Section: Introductionmentioning

confidence: 99%

“…For matched operation, the phase Ф in Fig. 1(a) must be 90°, and for mismatched operation Ф must be 0° [8]. Input and output of the system shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A new baseband equivalent model for sense mode dynamics and its effects on force-feedback controller design for MEMS gyroscopes

Eminoglu

Alper

Akın

2011

2011 IEEE SENSORS Proceedings

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This paper introduces a new baseband equivalent model for the sense mode dynamics of a MEMS gyroscope providing a more accurate force-feedback controller design applicable to high-performance sensors with a small frequency separation between drive and sense modes. This new baseband equivalent model for sense dynamics correctly models the step response of the system allowing both "true prediction of the system bandwidth", with an error less than 1%, and "proper control of the transient behavior" such as ringing, settling time, etc. It has also been demonstrated that the designed force-feedback controller based on the new model improves the angle random walk and bias stability performance of a MEMS gyroscope by a factor of 9 and 3, respectively, compared to the same controller architecture design based on the conventional over-simplified sense dynamic model.

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Modeling of a three-axes MEMS gyroscope with feedforward PI quadrature compensation

Marano

Cammarata

Fichera

et al. 2016

Lecture Notes in Mechanical Engineering

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Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

Cited by 138 publications

References 9 publications

A 3-D Micromechanical Multi-Loop Magnetometer Driven Off-Resonance by an On-Chip Resonator

A 3-D Micromechanical Multi-Loop Magnetometer Driven Off-Resonance by an On-Chip Resonator

A new baseband equivalent model for sense mode dynamics and its effects on force-feedback controller design for MEMS gyroscopes

Modeling of a three-axes MEMS gyroscope with feedforward PI quadrature compensation

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