Qualification of 1030 nm ultra-short-pulsed laser for glass sheet treatment in TGV process

Vanda, Jan; Muresan, Mihai-George; Čech, Pavel; Mydlar, Martin; Pilna, Katerina; Smrž, Martin; Chyla, Michal; Mužík, Jiří; Štěpánková, Denisa; Brajer, Jan; Mocek, Tomáš; Stoklasa, Bohumil; Venos, Stepan; Kuchařík, Jiří

doi:10.1117/12.2610143

Cited by 3 publications

(3 citation statements)

References 10 publications

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“…almost diffraction limited ideal Gaussian beam. This enables very efficient splitting of the beam by diffractive optical elements (DOE), and parallel processing with all advantages of precise energy distribution and displacement-free beams pattern, even when using Bessel beam optics [3] and harmonics generation [4]. Pulse duration measured by intensity autocorrelation after pulse compression was as short as 0.9 ps at 343 nm, with energy at fundamental wavelength 10 mJ and 1 kHz repetition rate.…”

Section: Perla Platform Uv Conversionmentioning

confidence: 99%

An overview on laser damage performance of current AR-coated windows at 343 nm and ultrashort pulses

Vanda,

Mydlar,

Narayanasamy

et al. 2023

Laser-Induced Damage in Optical Materials 2023

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Section: Perla Platform Uv Conversionmentioning

confidence: 99%

An overview on laser damage performance of current AR-coated windows at 343 nm and ultrashort pulses

Vanda,

Mydlar,

Narayanasamy

et al. 2023

Laser-Induced Damage in Optical Materials 2023

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“…The influence of crater depth and size on the etching speed should be further investigated, as well as difference in etching of craters created by 1030 and 515 radiation. Preliminary etching results of samples produced by single beam at 1030 nm were published in [12]. On the figure 15 is image of the substrate treated with multibeam at rep. rate 10 kHz, making effective crater speed production at 60 000 holes/s.…”

Section: Glass Sheet Processing For Etchingmentioning

confidence: 99%

LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment

Vanda

Mydlar

Pilna

et al. 2022

Laser-Induced Damage in Optical Materials 2022

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Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs.

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“…This field is seeing rapid growth in creating functional surfaces using advanced structuring methods [1]. Our focus in this paper is on the significant advancements in high-speed surface micro/nanostructuring, highlighting the role of multi-beam processing methods in enhancing surface functionality [2][3][4].…”

Section: Introductionmentioning

confidence: 99%

Advancements in high-speed surface micro/nanostructuring using multi-beam processing approaches

Hauschwitz

2024

High-Power Laser Ablation VIII

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This study delves into advanced multi-beam technologies, focusing on the integration of Diffractive Optical Elements (DOEs) and Spatial Light Modulators (SLMs) in micro and nanostructuring. Significant productivity gains, surpassing traditional single-beam methods, are highlighted, illustrating the transformative impact of these technologies in the field. Specifically, DOE and SLM have been instrumental in applications ranging from biocompatibility enhancement in medical implants to friction reduction in machining tools. The research showcases the capability of these technologies to intricately tailor surface properties at micro and nano scales, opening new pathways in diverse sectors such as healthcare and manufacturing.

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Qualification of 1030 nm ultra-short-pulsed laser for glass sheet treatment in TGV process

Cited by 3 publications

References 10 publications

An overview on laser damage performance of current AR-coated windows at 343 nm and ultrashort pulses

An overview on laser damage performance of current AR-coated windows at 343 nm and ultrashort pulses

LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment

Advancements in high-speed surface micro/nanostructuring using multi-beam processing approaches

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