2019
DOI: 10.1364/oe.27.015943
|View full text |Cite
|
Sign up to set email alerts
|

Quality and parameter control of X-ray absorption gratings by angular X-ray transmission

Abstract: Here we report on a non-destructive, spatially resolving and easy to implement quality and parameter control method for high aspect ratio X-ray absorption gratings. Based on angular X-ray transmission measurements, our proposed technique allows to determine the duty cycle, the transmittance, the height, as well as the local inclination of the absorbing grating structures. A key advantage of the presented method is a fast and extensive grating quality evaluation without the need of implementing an entire gratin… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
16
0

Year Published

2022
2022
2023
2023

Publication Types

Select...
5
1

Relationship

3
3

Authors

Journals

citations
Cited by 13 publications
(16 citation statements)
references
References 22 publications
0
16
0
Order By: Relevance
“…Ensuring the uniformity of the gratings’ duty cycle and lamella height is crucial for maximising the visibility of the setup and, thus, image quality. The newly developed angular X-ray transmission 28 (Fig. 2f ) allows for non-destructive and easily implementable parameter examination of gratings, and conventional SEM (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Ensuring the uniformity of the gratings’ duty cycle and lamella height is crucial for maximising the visibility of the setup and, thus, image quality. The newly developed angular X-ray transmission 28 (Fig. 2f ) allows for non-destructive and easily implementable parameter examination of gratings, and conventional SEM (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Grating Characterization. The AXT analysis method used for grating characterization provides spatially resolved mapping of several grating parameters and was originally proposed for rectangular, high-aspect ratio absorption gratings (36). However, it is also applicable to our phase grating G 1 considering two aspects.…”
Section: Methodsmentioning
confidence: 99%
“…2 A , an example of a 280-µ m-high grating structure with an aspect ratio exceeding 100 demonstrates the most recent LIGA fabrication results. In order to closely monitor and improve the fabrication process at this level and to ensure coverage of the whole detector surface with sufficient grating quality and low defect rate, we have developed a dedicated angular X-ray transmission (AXT) analysis, which extends the standard quality control process ( 36 ). For that purpose, we assign a quality shape factor to characterize the fabricated gratings.…”
Section: Optimization and Characterization Proceduresmentioning
confidence: 99%
“…Ensuring the uniformity of the gratings' duty cycle and lamella height are crucial for maximizing the visibility of the setup and thus image quality. The newly developed angular X-ray transmission 19 (Figure 1f) allows for non-destructive and easily implementable parameter examination of gratings, and conventional SEM (Figure 1f, Inlet) was used for local and surface-based analysis. The interferometric visibility also depends on the number of moiré fringes as depicted in Figure 1g.…”
Section: The Dark-field X-ray Prototypementioning
confidence: 99%
“…The pandemic of severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2) has led to a global medical, social, and economic crisis. The respective respiratory illness, coronavirus disease 2019 (COVID- 19), has so far caused over six million deaths worldwide 4 . At present, the reverse transcription-polymerase chain reaction (RT-PCR) test is the standard of reference for the definitive diagnosis of COVID-19 5,6 .…”
mentioning
confidence: 99%