Fundamentals of Nanomechanical Resonators 2016
DOI: 10.1007/978-3-319-28691-4_2
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Quality Factor

Abstract: The quality factor defines the rate with which a nanomechanical resonator dissipates energy. Low energy loss, i.e. a high quality factor, is desirable for most applications of nanomechanical resonators. In this chapter, the three main sources of energy loss in nanomechanical resonators are presented. Energy can be lost (1) to the surrounding medium, which can be a liquid or a gas, (2) through the clamping to the substrate via elastic waves, or (3) through dissipation mechanisms that are intrinsic to the resona… Show more

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Cited by 6 publications
(7 citation statements)
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“…Except for an initial rise in Q due to damping dilution, the reference Q did not show any major signal changes during the temperature ramp. The reader is referred to the Supporting Information for a comparison between reference and sample Q of this measurement.…”
Section: Resultsmentioning
confidence: 88%
See 1 more Smart Citation
“…Except for an initial rise in Q due to damping dilution, the reference Q did not show any major signal changes during the temperature ramp. The reader is referred to the Supporting Information for a comparison between reference and sample Q of this measurement.…”
Section: Resultsmentioning
confidence: 88%
“…Figure b also introduces the Q measurements. The Q of a resonator is a measure of the rate of energy dissipation and is directly related to the viscoelastic material damping . The damping is frequency dependent and therefore enables a more dynamical measure of the material.…”
Section: Resultsmentioning
confidence: 99%
“…Unlike the mechanical and electro-static actuation, frequency upshift has been observed in the resonator under electro-thermal actuation. The decrease in the quality factor suggests that the energy dissipated in the resonator is larger than the energy stored at resonant frequency [36], which can be explained by the higher damping [16] or more surface loss [37] of the energy as higher AC voltage is applied to the membrane. The boost of thermal gradient in the membrane with increasing AC voltage might enhance the thermoelastic damping, which increases the dissipation [36].…”
Section: Frequency Shift and Quality Factormentioning
confidence: 99%
“…The third term represents the restoring force given by the pre-stressed material. The solution to this differential equation has been extensively described [59,62,63]. Here we present a general description to find the solutions and extract the properties of mechanical systems.…”
Section: D Mechanical Resonators: Stringsmentioning
confidence: 99%
“…Here we present a general description to find the solutions and extract the properties of mechanical systems. A very well known method to find a solution for the differential equation (2.9) is proposing an ansatz solution with separable variables [62].…”
Section: D Mechanical Resonators: Stringsmentioning
confidence: 99%