Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

Lu, Jian; Ikehara, Tsuyoshi; Kobayashi, Takeshi; Maeda, Ryutaro; Mutoh, T.

doi:10.1007/s00542-006-0272-2

Cited by 13 publications

(6 citation statements)

References 16 publications

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“…Novel sensing methods for PAS have been proposed, such as quartz-enhanced photoacoustic spectroscopy (QEPAS) 85–88 and cantilever-enhanced photoacoustic spectroscopy (CEPAS). 89–94 For an in-depth review of PAS techniques, the reader is referred to other publications. 95–97 A comprehensive review of the recent development and progress of infrared PAS techniques to 2011 was reported by Li et al 98…”

Section: Modern Laser Spectroscopy Techniquesmentioning

confidence: 99%

Applications of Absorption Spectroscopy Using Quantum Cascade Lasers

Zhang

Тиан

et al. 2014

Appl Spectrosc

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Infrared laser absorption spectroscopy (LAS) is a promising modern technique for sensing trace gases with high sensitivity, selectivity, and high time resolution. Mid-infrared quantum cascade lasers, operating in a pulsed or continuous wave mode, have potential as spectroscopic sources because of their narrow linewidths, single mode operation, tunability, high output power, reliability, low power consumption, and compactness. This paper reviews some important developments in modern laser absorption spectroscopy based on the use of quantum cascade laser (QCL) sources. Among the various laser spectroscopic methods, this review is focused on selected absorption spectroscopy applications of QCLs, with particular emphasis on molecular spectroscopy, industrial process control, combustion diagnostics, and medical breath analysis.

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Section: Modern Laser Spectroscopy Techniquesmentioning

confidence: 99%

Applications of Absorption Spectroscopy Using Quantum Cascade Lasers

Zhang

Тиан

et al. 2014

Appl Spectrosc

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“…However, our recent efforts reveal that the energy dissipation from intrinsic loss of the PZT thin film was comparable to air dumping under atmospheric pressure. Under reduced pressures, the energy dissipation from the PZT thin film became predominant (Lu et al 2006a(Lu et al , 2007a. Those extraordinary large energy dissipation greatly degraded sensitivity of the microcantilever, since quality factor (Q-factor) of a cantilever is inversely proportional to the rate of energy dissipation, and it determines the minimum detectable frequency shift Df after loading-mass Dm adsorption as indicated by Eq.…”

Section: Introductionmentioning

confidence: 99%

High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection

Ikehara

Zhang

et al. 2008

Microsyst Technol

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A high quality factor (Q-factor) piezoelectric lead zirconate titanate (PZT) thin film actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra sensitive mass detection. Intrinsic energy dissipation and other negative effects from PZTelectrode stack were successfully compressed by separating the PZT actuator from the resonant structure. Excellent Qfactor, which is comparable to silicon cantilever (without actuator) and several times larger than that of latest reported other integrated cantilevers, was successfully obtained under both atmospheric pressure and reduced pressures. For a 30 lm-wide 100 lm-long cantilever, the Q-factor was measured as 1,113 and 7,279 under the pressure of 101.2 KPa and 35 Pa, respectively. Besides, it was found that greater Q-factor can be achieved at high vibration mode by the proposed structure. However, support loss became significant because of the increased actuator's vibration amplitude which in turn leads to unexpected energy dissipation. Therefore, an optimized structure using node-point actuation was suggested and discussed in last section of this paper.

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“…For chemical and biological sensing, the surface of microresonators can be covered with a sensitive coating to absorb the chemical and biological species [ 21 , 22 ]. Several microresonators also use piezoelectric multilayers due to their advantages such as compact structure, low driving voltage, self-actuation and self-sensing capability, and easy integration with electronic circuits [ 23 ].…”

Section: Introductionmentioning

confidence: 99%

Analytical Modeling for the Bending Resonant Frequency of Multilayered Microresonators with Variable Cross-Section

Herrera-May

Aguilera-Cortés

Mora

et al. 2011

Sensors

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Multilayered microresonators commonly use sensitive coating or piezoelectric layers for detection of mass and gas. Most of these microresonators have a variable cross-section that complicates the prediction of their fundamental resonant frequency (generally of the bending mode) through conventional analytical models. In this paper, we present an analytical model to estimate the first resonant frequency and deflection curve of single-clamped multilayered microresonators with variable cross-section. The analytical model is obtained using the Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. Our model is applied to two multilayered microresonators with piezoelectric excitation reported in the literature. Both microresonators are composed by layers of seven different materials. The results of our analytical model agree very well with those obtained from finite element models (FEMs) and experimental data. Our analytical model can be used to determine the suitable dimensions of the microresonator’s layers in order to obtain a microresonator that operates at a resonant frequency necessary for a particular application.

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Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

Cited by 13 publications

References 16 publications

Applications of Absorption Spectroscopy Using Quantum Cascade Lasers

Applications of Absorption Spectroscopy Using Quantum Cascade Lasers

High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection

Analytical Modeling for the Bending Resonant Frequency of Multilayered Microresonators with Variable Cross-Section

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