Quality factors in micron- and submicron-thick cantilevers

Yasumura, K.; Stowe, T. D.; Chow, Eugene M.; Pfafman, T.; Kenny, Thomas W.; Stipe, B. C.; Rugar, D.

doi:10.1109/84.825786

Cited by 616 publications

(493 citation statements)

References 16 publications

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“…Nevertheless since the ratio of the volume to surface area changed with the milling process, surface effects might play a larger role on the measured Q for these cantilevers. For example the cantilever Q might have decreased because the cantilevers' surface was contaminated or because the cantilever surface was oxidized by the formation of SiO 2 , similar to what other researchers have reported [22]. However, this alone cannot explain the decrease in Q observed here, which is much larger than that reported by other researchers for contamination and oxidation.…”

Section: Modified Cantilever Characteristics Before and After The Ioncontrasting

confidence: 56%

“…However, the scattered Ga+ ions still lead to radiation damage in the silicon, leading to a decrease in the Q, just as we have observed in our cantilevers. As the Q measurement is done in vacuum, the viscous drag due to the air is negligible in our experiments and only the internal stresses of the cantilever determine the quality factor Q [22]. Nevertheless since the ratio of the volume to surface area changed with the milling process, surface effects might play a larger role on the measured Q for these cantilevers.…”

Section: Modified Cantilever Characteristics Before and After The Ionmentioning

confidence: 97%

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Customized silicon cantilevers for Casimir force experiments using focused ion beam milling

Castillo-Garza

Chang

Yan

et al. 2009

J. Phys.: Conf. Ser.

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Generation and monitoring of directed neutrino beams using electron-capturedecay sources C. Abstract. Higher sensitivity cantilevers will lead to exploration of new phenomena in the Casimir effect. We have used focused ion beam milling to reduce the width of a commercial single crystal, rectangular-shaped silicon cantilevers with a massive Cr/Au-coated-hollow sphere attached at their free end. Theoretically these milled and modified cantilevers should have better Casimir force sensitivity than their non-milled counterparts. In this preliminary report however only 1 out of 4 modified cantilevers were found to have a higher force sensitivity. Future studies will be needed to determine the general applicability of focused ion beam milling for force sensitivity improvements in comparison to the complete nanofabrication of cantilevers.

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Section: Modified Cantilever Characteristics Before and After The Ioncontrasting

confidence: 56%

Section: Modified Cantilever Characteristics Before and After The Ionmentioning

confidence: 97%

Customized silicon cantilevers for Casimir force experiments using focused ion beam milling

Castillo-Garza

Chang

Yan

et al. 2009

J. Phys.: Conf. Ser.

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“…The thermal force has a white spectral density and a Gaussian distribution with zero mean. The spectral density of the thermal force for the nth mode is given by [20][21][22][23][24][25] …”

Section: B Thermal Noisementioning

confidence: 99%

“…The dissipation mechanisms include the viscous damping, the internal friction of the material, the clamping losses, and the thermoelastic dissipation. 21,22 However, for pressures higher than 1 mtorr, the dominant source of dissipation is the viscous damping. 21 Here, microcantilever arrays composed of 334-nm-thick silicon microcantilevers with various lengths and widths from 50 to 500 m and from 20 to 200 m, respectively, have been fabricated by using micromachining silicon technology.…”

Section: Introductionmentioning

confidence: 99%

“…21,22 However, for pressures higher than 1 mtorr, the dominant source of dissipation is the viscous damping. 21 Here, microcantilever arrays composed of 334-nm-thick silicon microcantilevers with various lengths and widths from 50 to 500 m and from 20 to 200 m, respectively, have been fabricated by using micromachining silicon technology. The spring constant, resonance frequency and Q factor have been measured to determine the dimension dependence of the thermomechanical noise.…”

Section: Introductionmentioning

confidence: 99%

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Dimension dependence of the thermomechanical noise of microcantilevers

Álvarez¹,

Tamayo²,

Plaza

et al. 2006

Journal of Applied Physics

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Thermomechanical noise determines the lowest detection limits of microcantilever-based devices for measuring forces and surface stress variations. In this work, arrays of 334-nm-thick single-crystalline silicon microcantilevers with dissimilar lengths and widths from 50 to 500 m and 20 to 200 m, respectively, have been fabricated to calculate the minimal detectable force and surface stress on the basis of the measurement of the spring constant, resonance frequency, and quality factor. The calculated minimal detectable force and surface stress are of the orders of 10 −15 N Hz −1/2 and 10 −7 N m −1 Hz −1/2 , respectively, and both follow a nonintuitive dependence on the dimensions. The minimal detectable force decreases as the cantilevers are shorter and narrower, whereas the minimal detectable surface stress decreases by making the cantilevers shorter and wider. Theoretical expressions of the minimal detectable force and surface stress are provided as a function of the material properties, cantilever dimensions, and quality factor, which allow us to interpret the results. Both force and surface stress noises follow the same dependence on the quality factor and material properties, however, exhibit striking differences in the dimension dependences. The force and surface stress noises enhance with the quality factor. If the quality factor is kept constant, the force noise enhances as the cantilever is longer and wider, whereas the surface stress noise enhances by making the cantilever shorter and wider. The observed increase of the force noise with the length is attributed to the strong decrease of the quality factor. The results imply that the design of cantilevers for surface stress measurements in general should be different than for atomic force microscopy probes.

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Transceiver Front‐End Architectures Using Vibrating Micromechanical Signal Processors

Nguyen

2001

RF Technologies for Low Power Wireless Communications

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Transceiver architectures are proposed that best harness the tiny size, zero dc power dissipation, and ultra-high-Q of vibrating micromechanical resonator circuits. Among the more aggressive architectures proposed are one based on a micromechanical RF channel-selector and one featuring an all-MEMS RF front-end. These architectures maximize performance gains by using highly selective, low-loss micromechanical circuits on a massive scale, taking full advantage of Q versus power trade-offs. Micromechanical filters, mixerfilters, and switchable synthesizers are identified as key blocks capable of substantial power savings when used in the aforementioned architectures. As a result of this architectural exercise, more focused directions for further research and development in RF MEMS are identified.

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Quality factors in micron- and submicron-thick cantilevers

Cited by 616 publications

References 16 publications

Customized silicon cantilevers for Casimir force experiments using focused ion beam milling

Customized silicon cantilevers for Casimir force experiments using focused ion beam milling

Dimension dependence of the thermomechanical noise of microcantilevers

Transceiver Front‐End Architectures Using Vibrating Micromechanical Signal Processors

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