2014
DOI: 10.1063/1.4885426
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Quantifying coherent and incoherent cathodoluminescence in semiconductors and metals

Abstract: Characterization of carrier concentration and stress in GaAs metal-semiconductor field-effect transistor by cathodoluminescence spectroscopy

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Cited by 60 publications
(60 citation statements)
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“…On metal surfaces such impacts also generate surface plasmon polaritons (SPPs) propagating radially from the impact point. Indeed, for certain metals at certain frequencies and electron energies the efficiency of coupling to SPPs may be greater than to TR, but SPPs can only contribute to free-space (far-field) light emission in the presence of a decoupling structure such as a grating; TR is otherwise the dominant output component2122. The TR from an electron normally incident on a metal surface has a cylindrically symmetric toroidal emission pattern (illustrated schematically in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…On metal surfaces such impacts also generate surface plasmon polaritons (SPPs) propagating radially from the impact point. Indeed, for certain metals at certain frequencies and electron energies the efficiency of coupling to SPPs may be greater than to TR, but SPPs can only contribute to free-space (far-field) light emission in the presence of a decoupling structure such as a grating; TR is otherwise the dominant output component2122. The TR from an electron normally incident on a metal surface has a cylindrically symmetric toroidal emission pattern (illustrated schematically in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 2 a shows a CL spectrum taken from a bulk gallium arsenide crystal measured using our CL setup showing the characteristic bandedge emission at λ 0 = 870 nm. 11 The measured azimuthally-averaged angular emission distribution around λ 0 = 870 nm is shown in Figure 2b . A Lambertian angular profi le is found, consistent with an isotropic emission distribution within the GaAs crystal (see inset in Figure 2a ).…”
Section: Cathodoluminescence Imaging Instrumentmentioning
confidence: 99%
“…7). If angle resolved CL can be performed by imaging the light collected from a mirror using a 2D CCD camera then the coherent and incoherent contributions can be further separated as described in [36] for SEM-CL. Angle resolved CL has been carried out in the TEM by Yamamoto et al [37] using a larger mirror than ours in a 15 mm pole piece gap microscope.…”
Section: Implications For Tem-cl Measurementsmentioning
confidence: 99%