Quantitative Accelerated Life Testing of MEMS Accelerometers

Bazu, M.; Galateanu, L.; Ilian, V.; Loicq, Jérôme; Habraken, Serge; Collette, Jean-Paul

doi:10.3390/s7112846

Cited by 21 publications

(8 citation statements)

References 10 publications

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“…This acoustic test will be most suitable for MEMS microphones. In addition to the mechanical-based test, the thermal-based test permits accelerated testing of DUT [80]. A commercial thermoelectric module could be placed under the DUT to provide low temperatures down to -40 • C, while a distributed thin film resistor could be used to heat the devices up to 150 • C. Finally, a thermocouple attached to the DUT will be used to measure its temperature.…”

Section: Separating the Contribution Of Electrical And Mechanical Noimentioning

confidence: 99%

Noise as Diagnostic Tool for Quality and Reliability of MEMS

Mohd-Yasin

Nagel

2021

Sensors

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This perspective explores future research approaches on the use of noise characteristics of microelectromechanical systems (MEMS) devices as a diagnostic tool to assess their quality and reliability. Such a technique has been applied to electronic devices. In comparison to these, however, MEMS have much more diverse materials, structures, and transduction mechanisms. Correspondingly, we must deal with various types of noise sources and a means to separate their contributions. In this paper, we first provide an overview of reliability and noise in MEMS and then suggest a framework to link noise data of specific devices to their quality or reliability. After this, we analyze 13 classes of MEMS and recommend four that are most amenable to this approach. Finally, we propose a noise measurement system to separate the contribution of electrical and mechanical noise sources. Through this perspective, our hope is for current and future designers of MEMS to see the potential benefits of noise in their devices.

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Section: Separating the Contribution Of Electrical And Mechanical Noimentioning

confidence: 99%

Noise as Diagnostic Tool for Quality and Reliability of MEMS

Mohd-Yasin

Nagel

2021

Sensors

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“…Basically, the initiation of a drift for an electrical parameter can be seen as an indicator of a future failure. In the "worst case" approach, we define the failure moment at the moment of drift initiation [5]. We are aware that this is an extremely restrictive condition, because at that moment the device is still a functional one and it will be so, normally, for a long time period.…”

Section: The "Worst Case"approachmentioning

confidence: 99%

Lifetime prediction for components with scarce data: The “worst case” approach

Bazu

Galateanu

Ilian

et al. 2011

2011 IEEE 17th International Symposium for Design and Technology in Electronic Packaging (SIITME)

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A method for estimating the lifetime of the electronic components when scarce data are available is presented. Based on the "worst case" approach, the method also uses information obtained by failure analysis, as the necessary element for an accurate estimation of the reliability level. The method is useful for highly reliable modern components. In this paper, an example of using this method is given, focused on MEMS accelerometers.

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“…Moreover, the programme must have a result (e.g. the failure rate of the batch of devices) in a relatively short time period, no longer than 1-2 months [3].…”

Section: Quantitative Accelerated Testsmentioning

confidence: 99%

Reliability accelerated tests for microsystems

Bazu

Galateanu

Ilian

2011

Proceedings of the 2011 34th International Spring Seminar on Electronics Technology (ISSE)

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Accelerated testing is the current option in reliability. The paper introduces the main types of reliability accelerated tests used for microsystems: quantitative and qualitative ones, respectively. Then, a case study is shown, for a MEMS inertial sensor, which is a 3-Axis linear accelerometer. A combination of quantitative and qualitative tests was used, which allowed to estimate, by using "the worst case" approach, a value for the failure rate of the batch of devices (<10 -7 h -1 ), showing the high reliability of the studied devices.

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Quantitative Accelerated Life Testing of MEMS Accelerometers

Cited by 21 publications

References 10 publications

Noise as Diagnostic Tool for Quality and Reliability of MEMS

Noise as Diagnostic Tool for Quality and Reliability of MEMS

Lifetime prediction for components with scarce data: The “worst case” approach

Reliability accelerated tests for microsystems

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