Quantitative analysis of anisotropic edge retraction by solid-state dewetting of thin single crystal films

Kim, Gye Hyun; Zucker, Rachel; Ye, Jongpil; Carter, W. Craig; Thompson, Carl V.

doi:10.1063/1.4788822

Cited by 42 publications

(11 citation statements)

References 41 publications

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“…In polycrystalline films, the change in surface energy anisotropy can also change the facets and surface profiles in grain boundary grooves and in the rims of the retracting edges. This might affect the kinetics of grain boundary grooving and edge retraction (hole growth) differently [21,78,[94][95][96], leading to temperature-dependent dewetting morphologies. Varying the annealing ambient at a given temperature can also affect the surface energy anisotropy, leading to the change of dewetting morphologies as shown in Figure 9(b,c).…”

Section: Annealing Temperaturementioning

confidence: 99%

Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems

Zuev

Makarov

2018

International Materials Reviews

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Recent progress in submicron-and nano-fabrication technologies has led to the emergence of novel photonic structures such as optical nanoantennas and metasurfaces. Real-life applications of these advanced photonic structures still require substantial improvement of the fabrication processes, in terms of their throughput and cost-effectiveness. Because of its simplicity and effectiveness, dewetting of a thin film has attained increasing attention as a feasible process for improving the scalability and productivity. Here, we provide an overview of the mechanisms and phenomenologies of dewetting to foster an improved fundamental understanding necessary for the optimisation of the dewetting process condition and template design. We then review the strategies demonstrating the use of templateddewetting for producing well-aligned arrays of submicron-and nanostructures with great control over their size, shape and arrangement. Recent applications of dewetted structures in advanced nanophotonics are reviewed with an emphasis on the exploitation of dewetting mechanisms. Special attention is given to the fabrication of resonant optical nanoantennas and nanophotonic applications in which high repeatability and throughput are important parameters: sensing, colourisation, photovoltaics and nonlinear light frequency conversion. We expect this review to provide a basis for the use of thin-film dewetting to realise the industrial-level fabrication of various practical advanced photonic systems.

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Section: Annealing Temperaturementioning

confidence: 99%

Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems

Zuev

Makarov

2018

International Materials Reviews

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“…Surface faceting is found to play a central role in determining a quantitative outcome of the process 49 . For = 1.2/100 a single wire is obtained with and without anisotropy, whereas the case = 1.2/200 deviates from experiments, providing two parallel wires as final state of the process, when neglecting preferential orientations (Fig.…”

Section: Resultsmentioning

confidence: 99%

Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits

et al. 2019

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Large-scale, defect-free, micro- and nano-circuits with controlled inter-connections represent the nexus between electronic and photonic components. However, their fabrication over large scales often requires demanding procedures that are hardly scalable. Here we synthesize arrays of parallel ultra-long (up to 0.75 mm), monocrystalline, silicon-based nano-wires and complex, connected circuits exploiting low-resolution etching and annealing of thin silicon films on insulator. Phase field simulations reveal that crystal faceting and stabilization of the wires against breaking is due to surface energy anisotropy. Wires splitting, inter-connections and direction are independently managed by engineering the dewetting fronts and exploiting the spontaneous formation of kinks. Finally, we fabricate field-effect transistors with state-of-the-art trans-conductance and electron mobility. Beyond the first experimental evidence of controlled dewetting of patches featuring a record aspect ratio of 1/60000 and self-assembled mm long nano-wires, our method constitutes a distinct and promising approach for the deterministic implementation of atomically-smooth, mono-crystalline electronic and photonic circuits.

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“…Experimental studies show that solid-state dewetting usually starts at defects or at the edges of the film [1,2]. Two model systems have been extensively studied in experiments: semiconductors on insulators (Si-SiO 2 or Ge-SiO 2 ) [3][4][5][6][7][8][9][10] and metals on insulators (Ni-MgO, Au-SiO 2 , or (Cu or Au)-sapphire) [11][12][13][14][15][16][17][18]. During solid-state dewetting, complex morphological evolutions are observed where the film evolves via various kinetic mechanisms depending on the shape and orientation of defects.…”

Section: Introductionmentioning

confidence: 99%

Disjoining-pressure-induced acceleration of mass shedding in solid-state dewetting

Tripathi

Pierre-Louis

2020

Phys. Rev. E

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Surface-diffusion mediated solid-state dewetting has been observed and studied in a number of different systems during the past two decades. This process can be accompanied by the pinching of the film at a finite distance from the retracting triple line. The repetition of this pinching is often referred to as periodic mass shedding. We show that the disjoining pressure of the film can accelerate mass shedding by orders of magnitude in ultrathin films with nanometric thickness. In the presence of power-law disjoining pressures induced by van der Waals forces, the mass shedding time exhibits an approximate power-law dependence on film thickness t ms ∼h ν , with ν ≈ 6. Exponentially decaying disjoining forces also give rise to a strong acceleration of mass shedding. However, due to the finite range of the exponential potential, the mass shedding time does not exhibit a simple power-law dependence on the thickness, and is controlled by a cutoff thickness. In addition, two-dimensional simulations indicate that, within the range of thicknesses that we have studied and for isotropic dynamics, the transversal instability of a straight front does not lead to fingering, and mass shedding is the dominant instability of the dewetting front. Finally, we also show that no significant difference is observed in the dewetting dynamics between simulations based on a model with a wetting potential integrated over the film surface area, or over the projected substrate area.

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Quantitative analysis of anisotropic edge retraction by solid-state dewetting of thin single crystal films

Cited by 42 publications

References 41 publications

Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems

Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems

Templated dewetting of single-crystal sub-millimeter-long nanowires and on-chip silicon circuits

Disjoining-pressure-induced acceleration of mass shedding in solid-state dewetting

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