Ambient moisture can dramatically promote the response of ZnO to ethanol vapor, a hydrophilic gas. By comparing sensor responses in a broad range of humidities, we show that there is a consistent enhancement in ethanol adsorption on ZnO when physisorbed water, detected by capacitance measurements, is present. The time constants related to the capacitive signal recovery during desorption are consistent with the formation of C 2 H 5 OH-(H 2 O) n clusters that have a different desorption rate than water alone. These room temperature results indicate that surface water mediates the dynamic adsorption/re-evaporation equilibrium of solvated ethanol molecules. Thus, attention to interactions between the target gas molecules and their environment is important for understanding the mechanisms behind selective gas sensing. © 2012 The Electrochemical Society. [DOI: 10.1149/2.019301jss] All rights reserved.Manuscript submitted August 28, 2012; revised manuscript received October 12, 2012. Published November 16, 2012 Moisture is always present in ambient environments, so an understanding of water-solid interactions is important in many applied fields such as corrosion, catalysis, and sensor development. 1 The surface structure and reactivity of semiconducting metal oxides (MOX) such as ZnO, SnO 2 and WO 3 have been studied extensively for electrical gas sensing applications. These materials have highly sensitive electrical conductivity and capacitance responses to many gaseous species including CO, NH 3 , and volatile organic compounds (VOCs) while having low production costs and high thermal durability.2 However, the presence of environmental H 2 O can effectively alter the reactivities of MOX surfaces, which leads to difficulties in obtaining reliable and selective sensing signals for different target gases in real-world environments. [3][4][5][6] Most investigations on the gas sensing performance of MOX materials have focused on analyte gas detection at relatively high operating temperatures (500-800 K), where optimal sensing responses are normally reached.7 This is because the formation of surface hydroxyls from chemisorptive water dissociation tends to dominate at these high temperatures, and the net conductivity changes are determined by surface characteristics such as oxygen species density, surface defects and hydroxyl coverage.1 At these high temperatures, target gas molecules undergo a combustive type of reaction that yields oxidized or reduced species on the MOX surface. 8 In contrast, at low temperatures (≤ 400 K), physisorbed water in its molecular form can increase the surface conductivity by donating lone pair electrons to the oxide's space charge region. There is surprisingly little work that focuses on water effects on gas-sensing of MOX at room temperature, despite the urgent need for room temperature gas sensors.9 Polymeric sensors are typically preferred at ambient temperatures, but they can also be adversely affected by the presence of moisture, and they exhibit similar selectivity challenges to those en...