Quantitative Analytical Transmission Electron Microscopy

Kohler-Redlich, P.; Mayer, Jiřı́

doi:10.1007/978-3-662-07766-5_4

Cited by 3 publications

(1 citation statement)

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“…Energy filtering TEM allows for fast two-dimensional data acquisition and analysis and offers substantial advantages for the analysis of the elemental distribution in complex two-or three-dimensional nanostructures. 1 Moreover, series of images obtained by electron spectroscopic imaging (ESI) can be analysed quantitatively to reveal information on the chemical composition or even the bonding state of the different elements. 2,3 Though the energy resolution in ESI images is limited to y1 eV and the spatial resolution to y0?5 nm, there is still a large number of applications in which this is absolutely sufficient and the advantages of fast two-dimensional data acquisition prevail.…”

Section: Introductionmentioning

confidence: 99%

Energy filtering TEM analysis of nanoelectronic device structures: Fast and efficient way to assess chemical microstructures

Weirich¹,

Reinholdt²,

Крейбиг³

2008

Materials Science and Technology

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Devices in nano-electronics frequently consist of complex two- or three-dimensional structures with complex chemistries. A detailed characterisation thus requires not only a thorough structural characterisation, but also a highly resolved characterisation of elemental distributions. Energy filtering transmission electron microscopy is a very valuable tool for such investigations, as will be demonstrated on the basis of three different examples: a novel design of a nanoscale field effect transistor, a model design for a magnetic random access memory cell and magnetic core shell nanoparticles suitable for future nanoscale memory.

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Section: Introductionmentioning

confidence: 99%