2021
DOI: 10.1103/physrevapplied.15.024006
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Quantitative Assessment of Carrier Density by Cathodoluminescence. I. GaAs Thin Films and Modeling

Abstract: Doping is a fundamental property of semiconductors and constitutes the basis of modern microelectronic and optoelectronic devices. Their miniaturization requires contactless characterization of doping with nanometer scale resolution. Here, we use low-and room-temperature cathodoluminescence (CL) measurements to analyze p-type and n-type GaAs thin films over a wide range of carrier densities (2 × 10 17 to 1 × 10 19 cm −3 ). The spectral shift and broadening of CL spectra induced by shallow dopant states and ban… Show more

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Cited by 9 publications
(20 citation statements)
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References 52 publications
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“…It is used to eliminate faulty regions and to study variations of the carrier concentration in wellcontrolled homogeneous regions. In a previous work, we have demonstrated the quantitative analysis of electron concentration in Si-doped GaAs NWs [35], and the luminescence analysis method has been further validated on a series of p-type and n-type GaAs planar reference thin films [36]. Here, we extend this work to a series of Be-doped (core and shell) and Si-doped (shell) GaAs NWs grown under different conditions.…”
Section: Introductionmentioning
confidence: 76%
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“…It is used to eliminate faulty regions and to study variations of the carrier concentration in wellcontrolled homogeneous regions. In a previous work, we have demonstrated the quantitative analysis of electron concentration in Si-doped GaAs NWs [35], and the luminescence analysis method has been further validated on a series of p-type and n-type GaAs planar reference thin films [36]. Here, we extend this work to a series of Be-doped (core and shell) and Si-doped (shell) GaAs NWs grown under different conditions.…”
Section: Introductionmentioning
confidence: 76%
“…CL spectra are fitted using the generalized Planck's law and a parabolic absorption model convoluted with an Urbach tail, following the method described in Ref. [36]. Due to the small size of the NWs, we neglect the reabsorption effect so that the absorptivity is approximated by the absorption coefficient α(hω) [47].…”
Section: Be-doped Gaas Nanowiresmentioning
confidence: 99%
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