Quantitative Auger electron spectroscopy of SiC

Kosiba, R.; Liday, Jozef; Ecke, G.; Ambacher, O.; Breza, Juraj; Vogrinčič, Peter

doi:10.1016/j.vacuum.2006.01.003

Cited by 10 publications

(7 citation statements)

References 14 publications

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“…The peak shape of the spectrum from the interlayer can be assigned to pure Si, with its pronounced peak at 89 eV. The spectrum from the Si/DLC interface (in red) can be assigned to Si as SiC, with its broad peak at a lower KE of 86 eV, analogously to the Si(LMM) reference spectra published by R. Kosiba et al [32] and Hauert et al [31]. Therefore with agreement between both C(KLL) and Si(LMM) spectral fittings, this interface can indeed be assigned to SiC.…”

Section: Composition Characterization Of the Interlayer And Interfaces By Aesmentioning

confidence: 58%

A methodology for characterizing the electrochemical stability of DLC coated interlayers and interfaces

Ilic

Pardo

Suter

et al. 2019

Surface and Coatings Technology

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Section: Composition Characterization Of the Interlayer And Interfaces By Aesmentioning

confidence: 58%

A methodology for characterizing the electrochemical stability of DLC coated interlayers and interfaces

Ilic

Pardo

Suter

et al. 2019

Surface and Coatings Technology

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“…Nevertheless, careful selection of acquisition parameters and methodology is required as quantitative interpretation of Auger signals can lead to inaccurate results. 18 For such purposes, Auger mapping using the snapshot acquisition mode could be used since it has the advantage of limited time duration, while associated to standards it could lead to the determination of absolute Ce composition mapping.…”

Section: Discussionmentioning

confidence: 99%

Distribution of some active elements in primary graphite precipitates

Theuwissen

Duguet

Esvan

et al. 2016

International Journal of Cast Metals Research

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OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible. The distributions of cerium and oxygen in the matrix and in graphite precipitates of a pure Fe-C-Ce cast iron sample have been studied using scanning Auger microscopy. It is shown that there is no accumulation of any element at the graphite-matrix interface. Cerium was detected in some cases in spheroidal graphite precipitates, most often associated with oxygen. Various non-spheroidal graphite precipitates proved to contain cerium and oxygen suggesting a correlation between cerium content and graphite degeneracy.

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“…In this way, peak intensity or peak area can be extracted from direct mode and peak to peak intensity from derivative mode. (“peak-to-tail” or “peak-to-background” could be also used) …”

Section: Methodsmentioning

confidence: 99%

“…("peak-to-tail" or "peak-to-background" could be also used). 21 Qualitative AES survey spectra are recorded using a focused probe and using a CRR mode with dE/E = 0.5% (high sensitivity) in the range of 0−2500 eV kinetic energy and using a step size of 1 eV. Scanning Auger images are performed in CAE mode to enable defining the useful energy width needed to obtain a significant peak to background-intensity difference with respect to the Auger transition and the backgrounds shape.…”

Section: Xpsmentioning

confidence: 99%

Nanoscale Chemical Characterization of Solid-State Microbattery Stacks by Means of Auger Spectroscopy and Ion-Milling Cross Section Preparation

Uhart

Ledeuil

Pecquenard

et al. 2017

ACS Appl. Mater. Interfaces

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The current sustained demand for "smart" and connected devices has created a need for more miniaturized power sources, hence for microbatteries. Lithium-ion or "lithium-free" all-solid-state thin-film batteries are adapted solutions to this issue. The capability to carry out spatially resolved chemical analysis is fundamental for the understanding of the operation in an all-solid-state microbattery. Classically cumbersome and not straightforward techniques as TEM/STEM/EELS and FIB preparation methods could be used to address this issue. The challenge in this work is to make the characterization of Li-based material possible by coupling ion-milling cross section preparation method and AES techniques to characterize the behavior of a LiCoO positive electrode in an all solid state microbattery. The surface chemistry of LiCoO has been studied before and after LiPON deposition. Modifications of the chemical environments characteristic of the positive electrode have been reported at different steps of the electrochemical process. An original qualitative and a semiquantitative analysis has been used in this work with the peak deconvolution method based on real, certified reference spectra to better understand the lithiation/delithiation process. This original coupling has demonstrated that a full study of the pristine, cycled, and post mortem positive electrode in a microbattery is also possible. The ion-milling preparation method allows access to a large area, and the resolution of Auger analysis is highly resolved in energy to separate the lithium and the cobalt signals in an accurate way.

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Quantitative Auger electron spectroscopy of SiC

Cited by 10 publications

References 14 publications

A methodology for characterizing the electrochemical stability of DLC coated interlayers and interfaces

A methodology for characterizing the electrochemical stability of DLC coated interlayers and interfaces

Distribution of some active elements in primary graphite precipitates

Nanoscale Chemical Characterization of Solid-State Microbattery Stacks by Means of Auger Spectroscopy and Ion-Milling Cross Section Preparation

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