2009
DOI: 10.1016/j.nimb.2008.11.033
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Quantitative depth profiling of deuterium up to very large depths

Abstract: Quantitative depth pro les of deuterium up to very large depths are achieved from the energy spectra of protons created by the D( 3 He,p)α nuclear reaction at incident energies up to 6 MeV. The advantages of this method compared to the more often applied resonance method are discussed. For light target materials the achievable depth resolution is mainly limited by geometrical spread due to the nite size of the detector aperture, while for heavy materials the resolution is mainly limited by multiple small-angle… Show more

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Cited by 135 publications
(85 citation statements)
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“…NRA was performed at IPP-Garching. Multiple 3 He ion energies were used to further refine the depth profiling [10]; energies of 1.0, 1.4, 1.8, and 2.5 MeV were used to give a depth profile with ~0.5 µm resolution to a depth of 4 µm. The D concentrations are then integrated over the depth to give the total retention in the first 4 µm of the surface.…”
Section: D( 3 Hep)α Nuclear Reaction Analysismentioning
confidence: 99%
“…NRA was performed at IPP-Garching. Multiple 3 He ion energies were used to further refine the depth profiling [10]; energies of 1.0, 1.4, 1.8, and 2.5 MeV were used to give a depth profile with ~0.5 µm resolution to a depth of 4 µm. The D concentrations are then integrated over the depth to give the total retention in the first 4 µm of the surface.…”
Section: D( 3 Hep)α Nuclear Reaction Analysismentioning
confidence: 99%
“…Most importantly such microstructure leads to reduced D retention [2,3,5,6]. The formation of nano-bubbles by few eV to keV He ion irradiation is fluence and temperature dependent, having a formation threshold around a fluence of 3×10 20 He/m 2 at 290 K that is decreasing with the increase of temperature [4]. Similar nanobubble formation but in larger depth was observed by MeV He ion irradiation where a fluence threshold of 10 21 He/m 2 was obtained [7].…”
mentioning
confidence: 99%
“…After each step the sample was cooled down and the NRA analysis was performed on the no-He and He-irradiated half of the sample in-situ by detecting protons from the D( 3 He,p)α nuclear reaction. In order to determine the D depth profile [20] We used the same collected charge of 7.45 µC for all five energies, corresponding to an ion dose of 4.65×10 13 He + for the four lower energies and 2.3×10 13 He 2+ for the highest energy. The maximum 3 He concentration accumulated for each depth profile ranges between 0.08 at.…”
mentioning
confidence: 99%
“…integrating the D profile over depth [27][28][29][30][31][32]. A drawback of NRA is the limitation of measurable depth.…”
mentioning
confidence: 99%