Quantitative determination of contact stiffness using atomic force acoustic microscopy

Rabe, U.; Amelio, S.; Kester, E.; Scherer, V.; Hirsekorn, S.; Arnold, W.

doi:10.1016/s0041-624x(99)00207-3

Cited by 270 publications

(250 citation statements)

References 19 publications

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“…c B contains the cantilever mass density, Young's modulus, and beam thickness. 1 The parameter c B is combined with the sample-coupled resonant frequencies to form the argument of a characteristic equation for the sample-coupled vibrations. This transcendental equation is solved to determine the value of the contact stiffness k* between the tip and the sample.…”

Section: A Analytical Methodsmentioning

confidence: 99%

“…Therefore, the characteristic equation for sample-coupled vibration has been modified to account for the possibility L 1 /LϽ1.0. 1 In this case, k* is plotted as a function of L 1 /L for each flexural mode. The value of k* where the curves intersect is considered the solution for k*.…”

Section: A Analytical Methodsmentioning

confidence: 99%

“…1, is similar to that of Rabe et al 1 The sample under invesa͒ Electronic address: hurley@boulder.nist.gov tigation is bonded to a longitudinal ultrasonic contact transducer that is subsequently affixed to the positioning stage of the AFM instrument. A function generator drives the transducer with a continuous sine wave.…”

Section: A Afam Techniquesmentioning

confidence: 99%

“…The position of the tip L 1 relative to the total length L of the cantilever can be characterized by the ratio L 1 /L. 1 As discussed below, L 1 /L is used as an adjustable parameter in the data analysis. By examining the cantilever in the SEM and the optical microscope, we estimated that L 1 /Lϭ0.95-0.97.…”

Section: B Cantilever Typesmentioning

confidence: 99%

See 3 more Smart Citations

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Hurley

Shen

Jennett

et al. 2003

Journal of Applied Physics

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140

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We discuss atomic force acoustic microscopy ͑AFAM͒ methods to determine quantitative values for the elastic properties of thin films. The AFAM approach measures the frequencies of an AFM cantilever's first two flexural resonances while in contact with a material. The indentation modulus M of an unknown or test material can be obtained by comparing the resonant spectrum of the test material to that of a reference material. We examined a niobium film (dϭ280Ϯ30 nm) with AFAM using two separate reference materials and two different cantilever geometries. Data were analyzed by two methods: an analytical model based on conventional beam dynamics, and a finite element method that accommodated variable cantilever cross section and viscous damping. AFAM values of M varied significantly depending on the specific experimental configuration and analysis technique.By averaging values obtained with both reference materials, very good agreement ͑5-10 % difference͒ with values determined by other methods was achieved. These results provide insight into using AFAM methods to attain reliable, accurate measurements of elastic properties on the nanoscale.

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Section: A Analytical Methodsmentioning

confidence: 99%

Section: A Analytical Methodsmentioning

confidence: 99%

Section: A Afam Techniquesmentioning

confidence: 99%

Section: B Cantilever Typesmentioning

confidence: 99%

See 2 more Smart Citations

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Hurley

Shen

Jennett

et al. 2003

Journal of Applied Physics

168

140

View full text Add to dashboard Cite

show abstract

“…Measurements of the resonant frequencies are analyzed with analytical models in order to obtain the elastic properties of the sample. 13 With few exceptions, 14,15 AFAM studies have been limited to modeling the tip-sample interaction as a linear spring. Dissipation due to damping and adhesion 16 is normally ignored.…”

Section: Introductionmentioning

confidence: 99%

Contact-resonance atomic force microscopy for viscoelasticity

Yuya

Hurley

Turner

2008

Journal of Applied Physics

162

189

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We present a quantitative method for determining the viscoelastic properties of materials with nanometer spatial resolution. The approach is based on the atomic force acoustic microscopy technique that involves the resonant frequencies of the atomic force microscopy cantilever when its tip is in contact with a sample surface. We derive expressions for the viscoelastic properties of the sample in terms of the cantilever frequency response and damping loss. We demonstrate the approach by obtaining experimental values for the storage and loss moduli of a poly͑methyl methacrylate͒ film using a polystyrene sample as a reference material. Experimental techniques and system calibration methods to perform material property measurements are also presented.

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Dynamic Contact AFM Methods for Nanomechanical Properties

Hurley

Killgore

2013

Scanning Probe Microscopy in Industrial Applications

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Quantitative determination of contact stiffness using atomic force acoustic microscopy

Cited by 270 publications

References 19 publications

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Contact-resonance atomic force microscopy for viscoelasticity

Dynamic Contact AFM Methods for Nanomechanical Properties

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