Quantitative electron probe microanalysis of ultralight elements (boron‐oxygen)

Bastin, GF Giel; Heijligers, Hjm Hans

doi:10.1002/sca.4950120408

Cited by 98 publications

(38 citation statements)

References 8 publications

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“…The correction was calculated by the Proza method. 31 A certified SiO 2 stoichiometric layer deposited by LPCVD was used as a calibration standard. Since EDX was not able to detect hydrogen, these measurements provided only information on the x value.…”

Section: Methodsmentioning

confidence: 99%

Bonding configuration and density of defects of SiOxHy thin films deposited by the electron cyclotron resonance plasma method

Andrés

Prado

Mártil

et al. 2003

Journal of Applied Physics

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The composition, bonding configuration, hydrogen content, and paramagnetic defects of SiO x H y thin films were studied. Films were deposited by the electron cyclotron resonance plasma method at room temperature using SiH 4 and O 2 as precursor gases. The film composition was measured by heavy ion elastic recoil detection analysis and energy dispersive x-ray spectroscopy. Suboxide films with compositions ranging from SiO 2 to SiH 0.38 were obtained. Infrared spectroscopy showed the presence of different Si-O and Si-H vibration modes. The usual estimation of the oxygen to silicon ratio by the wave number of the Si-O-Si stretching band was not accurate for films far from stoichiometry. These off-stoichiometric films also showed a broader Si-O-Si stretching peak than the stoichiometric ones, indicating a higher bonding disorder. The position of the Si-O-Si bending and rocking modes did not depend on the film composition. On the other hand, the peak position of the Si-H modes were found strongly dependent on the Si environment. By single-wavelength ellipsometry at ϭ632.8 nm the refractive index n was found to range between 1.45 (SiO 2 ) and 2.04 (SiO 0.06 H 0.36 ). Electron spin resonance measurements showed that stoichiometric films presented the well known EЈ center ("SiϵO 3 ) with concentrations in the 10 16 -10 17 cm Ϫ3 range, while for Si-rich films (xӶ1) the Si dangling bond center (Si DB , "SiϵSi 3 ) was the only detectable defect, with concentrations in the 10 18 -10 19 cm Ϫ3 range. In near-stoichiometric films both EЈ and Si DB centers were found.

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Section: Methodsmentioning

confidence: 99%

Bonding configuration and density of defects of SiOxHy thin films deposited by the electron cyclotron resonance plasma method

Andrés

Prado

Mártil

et al. 2003

Journal of Applied Physics

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“…Elemental composition (except for hydrogen) and mass thickness of the coatings were calculated using a col~l?uter code based on Yakovitz-Newbury method [8]. The algorithm took properly into account X-ray absorption inside a film (mass absorption coefficients were taken from [7,9,10]), that is of special importance for the light element analysis. Secondary fluorescence was not taken into account because it is negligibly small in B-C-0 systems.…”

Section: Methodsmentioning

confidence: 99%

Oxygen Effect on the Stability of PECVD Boron-Carbon Films

1995

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“…In order to determine the extent to which this occurred, the composition of epoxy-resin-embedded dentin was calculated for a series of mineral contents ranging from 10 to 75% (wt/wt) and Mg/Ca molar ratios varying between 0.03 and 0.30. ZAF corrections were then calculated by the Proza correction program (Bastin and Heijligers, 1990) for dentin-on the basis of C, N, 0, Cl, P, Ca, and Mg-and for the standards.…”

Section: Methodsmentioning

confidence: 99%

The Distribution of Magnesium in Developing Rat Incisor Dentin

et al. 1991

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Previous studies have shown that rat incisor dentin contains a considerable amount of magnesium that is distributed heterogeneously. The cementum-related dentin, especially its incisal portion, is richest in magnesium. It was the purpose of the present study to investigate the changes that occur in the magnesium content during dentin maturation.Cross-sections were prepared from rat incisors at the apical, middle, and incisal levels. By means of an electron microprobe, tracings were made of the Ca-, Mg-, and P-signal frequencies. Comparison of corresponding dentin layers within and between the cross-sections showed that the Mg/P molar ratio was always higher in the cementum-related dentin (CRD) than in the enamel-related dentin (ERD) and increased from the apex toward the incisal edge. Especially in the incisal crosssection, an increase in Mg/P was found from the older (peripheral) toward the younger (central) dentin layers. As the Mg/P ratio varied from 0.07 to 0.33, the Ca/P ratio was found to fluctuate from 1.48 to 1.15. The two ratios appeared to be highly correlated (r = -0.97; p<0.001), suggesting that Mg replaces Ca and is bound to phosphate. overdose of Nembutal injected intracardially. Their lower right jaws were dissected out and stored frozen. Cross-sectional slices (1 mm in thickness) of the incisors, together with the surrounding tissues, were prepared at an apical, middle, and incisal level (Fig. 1) by use of a Microslice 2 MR (Metals Research Ltd., Cambridge, England) with a diamond saw blade under constant water cooling. After removal of the surrounding bone, the cross-sections of the incisors were dehydrated through a graded series of ethanol and propyleneoxide and embedded in epoxy resin (Epon LX112, Ladd), which was polymerized at 60°C. All specimens were embedded simultaneously in the same piece of epoxy resin, in such a way that the slices obtained from one tooth were next to each other. The incisal aspect of each slice was then serially polished with silicon carbide abrasive paper (nos. 240 to 600), followed by a 0.03-,um aluminum oxide micropolisher.Electron microprobe analysis. -After the slices were coated with a carbon layer in a Balzer BEA 250 evaporator, the specimens were subjected to electron microprobe analysis in a JEOL Superprobe 733 (10 kV, 10 WxA, beam area 1 1Lm2, ten s per J Dent Res 70(3): 187-191, March, 1991

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Quantitative electron probe microanalysis of ultralight elements (boron‐oxygen)

Cited by 98 publications

References 8 publications

Bonding configuration and density of defects of SiOxHy thin films deposited by the electron cyclotron resonance plasma method

Bonding configuration and density of defects of SiOxHy thin films deposited by the electron cyclotron resonance plasma method

Oxygen Effect on the Stability of PECVD Boron-Carbon Films

The Distribution of Magnesium in Developing Rat Incisor Dentin

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