Quantitative imaging of sheet resistance with a scanning near-field microwave microscope

Steinhauer, D. E.; Vlahacos, C. P.; Dutta, S. K.; Feenstra, B. J.; Wellstood, F. C.; Anlage, Steven M.

doi:10.1063/1.120918

Cited by 110 publications

(75 citation statements)

References 11 publications

(23 reference statements)

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…From Eqns. (8) and (9), a standard sample with known conductivity is measured to determineP cavloss , and other unknown samples can be measured. With a standard sample of 200 nm thick Cu (σ = 5.88 × 10 7 S/m) 23 film deposited on glass, P cavloss is found to be 3.86 × 10 −8 W , and E total is 6.24 × 10 −16 J .…”

Section: Resultsmentioning

confidence: 99%

Measurement of high frequency conductivity of oxide-doped anti-ferromagnetic thin film with a near-field scanning microwave microscope

Souza

Peng

et al. 2014

AIP Advances

View full text Add to dashboard Cite

In this manuscript, we describe how the map of high frequency conductivity distribution of an oxide-doped anti-ferromagnetic 200 nm thin film can be obtained from the quality factor (Q) measured by a near-field scanning microwave microscope (NSMM). Finite element analysis (FEA) is employed to simulate the NSMM tip-sample interaction and obtain a curve related between the simulated quality factor (Q) and conductivity. The curve is calibrated by a standard Cu thin film with thickness of 200 nm, together with NSMM measured Q of Ag, Au, Fe, Cr and Ti thin films. The experimental conductivity obtained by the NSMM for IrMn thin films with various doped concentrations of Al2O3 is found consistent with conventional voltammetry measurement in the same tendency. That conductivity decreases as the content of doped Al2O3 increases. The results and images obtained demonstrate that NSMM can be employed in thin film analysis for characterization of local electrical properties of materials in a non-destructive manner and for obtaining a map of conductivity distribution on the same film.

show abstract

Section: Resultsmentioning

confidence: 99%

Measurement of high frequency conductivity of oxide-doped anti-ferromagnetic thin film with a near-field scanning microwave microscope

Souza

Peng

et al. 2014

AIP Advances

View full text Add to dashboard Cite

show abstract

“…The first embodiment of this concept was conceived for measuring the moisture content of paper [40]. Other embodiments use coaxial transmission lines with the sample in contact with the open end [41,42,43,44,45,46,47,48,49,50,51,52,53,54,55,56], or with an air gap between the probe and the sample [43,44,45,46,47,48,49,50,51,52,53,54,55]. A related far-field technique has been used to image surface resistance and nonlinearity with a scanned dielectric resonator in contact with the sample [8].…”

Section: An Overview Of Microwave Microscopy Techniquesmentioning

confidence: 99%

“…2) [46,47]. The microwave source is frequency modulated by an external oscillator at a rate f F M ∼ 3 kHz.…”

Section: Detailed Description Of the Maryland Microscopementioning

confidence: 99%

“…We monitor these perturbations using a diode detector which produces a voltage signal proportional to the power reflected from the resonator. A feedback circuit [47] (Fig. 2) keeps the microwave source locked to a resonant frequency of the transmission line, and has a voltage output which is proportional to shifts in the resonant frequency due to the sample.…”

Section: Detailed Description Of the Maryland Microscopementioning

confidence: 99%

See 1 more Smart Citation

Near-Field Microwave Microscopy of Materials Properties

Anlage

Steinhauer

Feenstra

et al. 2001

Microwave Superconductivity

Self Cite

View full text Add to dashboard Cite

Abstract. Near-field microwave microscopy has created the opportunity for a new class of electrodynamics experiments of materials. Freed from the constraints of traditional microwave optics, experiments can be carried out at high spatial resolution over a broad frequency range. In addition, the measurements can be done quantitatively so that images of microwave materials properties can be created. We review the five major types of nearfield microwave microscopes and discuss our own form of microscopy in detail. Quantitative images of microwave sheet resistance, dielectric constant, and dielectric tunability are presented and discussed. Future prospects for near-field measurements of microwave electrodynamic properties are also presented.

show abstract

“…Such SMMs have already been used for condensed matter research to evaluate the sheet resistances of metal oxide thin films [3,14], superconductors [15,16] and combinatorial materials [17,18]. The value of the SMM will be further enhanced by cryogenic applications, and provide us with insights regarding the origin of various physical phenomena.…”

Section: Introductionmentioning

confidence: 99%

Low-temperature-compatible tunneling-current-assisted scanning microwave microscope utilizing a rigid coaxial resonator

Takahashi

Imai

Maeda

2016

Review of Scientific Instruments

View full text Add to dashboard Cite

We present a design for a tunneling-current-assisted scanning near-field microwave microscope. For stable operation at cryogenic temperatures, making a small and rigid microwave probe is important. Our coaxial resonator probe has a length of approxomately 30 mm and can fit inside the 2-inch bore of a superconducting magnet. The probe design includes an insulating joint, which separates DC and microwave signals without degrading the quality factor. By applying the SMM to the imaging of an electrically inhomogeneous superconductor, we obtain the spatial distribution of the microwave response with a spatial resolution of approximately 200 nm. Furthermore, we present an analysis of our SMM probe based on a simple lumped-element circuit model along with the near-field microwave measurements of silicon wafers having different conductivities.

show abstract

Quantitative imaging of sheet resistance with a scanning near-field microwave microscope

Cited by 110 publications

References 11 publications

Measurement of high frequency conductivity of oxide-doped anti-ferromagnetic thin film with a near-field scanning microwave microscope

Measurement of high frequency conductivity of oxide-doped anti-ferromagnetic thin film with a near-field scanning microwave microscope

Near-Field Microwave Microscopy of Materials Properties

Low-temperature-compatible tunneling-current-assisted scanning microwave microscope utilizing a rigid coaxial resonator

Contact Info

Product

Resources

About