Quantitative kinetic analysis of silicon nitridation

Pigeon, R. G.; Varma, Arvind

doi:10.1007/bf00354705

Cited by 37 publications

(41 citation statements)

References 49 publications

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“…3 that the shape of the thermograms becomes sigmoidal when the mass is increased. This kind of kinetics has often been reported by other authors who followed different synthesis routes of Si 3 N 4 [23,26]. Our results clearly indicate that this apparent kinetics may be due to extrinsic parameters related to the amount of particles.…”

Section: Dependence Of the Nitridation Rate On The Amount Of Samplesupporting

confidence: 88%

“…The actual mechanism is not fully understood and, as far as we know, no kinetic studies have been published hitherto. Kinetic studies on the nitridation of Si compacts have delivered a myriad of models that often relate to a particular experimental setup [23].…”

Section: Introductionmentioning

confidence: 99%

“…Such a variety of results can be attributed to the noteworthy influence of particle size, particle distribution, oxygen partial pressure and some impurities on the reaction kinetics [23,24].…”

Section: Introductionmentioning

confidence: 99%

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Kinetic study of the oxide‐assisted catalyst‐free synthesis of silicon nitride nanowires

Farjas

Pinyol

Rath

et al. 2006

Physica Status Solidi (a)

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The synthesis of Si 3 N 4 nanowires from the reaction of silicon nanoparticles with N 2 in the 1200-1440ºC temperature range is reported. The nitridation conditions are such that the reaction with nitrogen is favoured by the presence of silicon oxide in the particles and by the active oxidation of silicon without a catalyst. It is shown that the Si to Si 3 N 4 conversion rate depends on the amount of silicon particles used in the experiments and that, in general, the reaction slows down for greater amounts. This trend is explained by particle stacking, which restricts the exchange of gases between the furnace atmosphere and the atmosphere around the inner particles. In a first stage, local oxygen partial pressure increases around the inner particles and inhibits nitridation locally. If the amount of reactant Si nanoparticles is small enough, this extrinsic effect is avoided and the intrinsic nitridation kinetics can be measured.Experiments show that intrinsic kinetics does not depend on temperature.

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Section: Dependence Of the Nitridation Rate On The Amount Of Samplesupporting

confidence: 88%

Section: Introductionmentioning

confidence: 99%

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Kinetic study of the oxide‐assisted catalyst‐free synthesis of silicon nitride nanowires

Farjas

Pinyol

Rath

et al. 2006

Physica Status Solidi (a)

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“…Figure 1). Recently, Pigeon and Varma (1993) incorporated this important aspect into their determination of the single-particle kinetics of silicon nitridation. These studies, which take the change in volume -and ensuing change in diffusion resistance-into account, are certainly valid.…”

Section: Aiche Journalmentioning

confidence: 99%

Reaction rate modeling in noncatalytic gas‐solid systems: Species transport and mechanical stress

1995

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“…Since nitridation proceeds faster for larger specific surface area, 23,24 the reaction rate is higher for SiNPs than for Si-Ps. The time required for complete nitridation decreases steadily with temperature.…”

mentioning

confidence: 99%

Si 3 N 4 single-crystal nanowires grown from silicon micro- and nanoparticles near the threshold of passive oxidation

Farjas

Rath

Pinyol

et al. 2005

Applied Physics Letters

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A simple and most promising oxide-assisted catalyst-free method is used to prepare silicon nitride nanowires that give rise to high yield in a short time. After a brief analysis of the state of the art, we reveal the crucial role played by the oxygen partial pressure: when oxygen partial pressure is slightly below the threshold of passive oxidation, a high yield inhibiting the formation of any silica layer covering the nanowires occurs and thanks to the synthesis temperature one can control nanowire dimensions.

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Quantitative kinetic analysis of silicon nitridation

Cited by 37 publications

References 49 publications

Kinetic study of the oxide‐assisted catalyst‐free synthesis of silicon nitride nanowires

Kinetic study of the oxide‐assisted catalyst‐free synthesis of silicon nitride nanowires

Reaction rate modeling in noncatalytic gas‐solid systems: Species transport and mechanical stress

Si 3 N 4 single-crystal nanowires grown from silicon micro- and nanoparticles near the threshold of passive oxidation

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