2017
DOI: 10.1063/1.4976729
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Quantitative microwave impedance microscopy with effective medium approximations

Abstract: Microwave impedance microscopy (MIM) is a scanning probe technique to measure local changes in tip-sample admittance. The imaginary part of the reported change is calibrated with finite element simulations and physical measurements of a standard capacitive sample, and thereafter the output ΔY is given a reference value in siemens. Simulations also provide a means of extracting sample conductivity and permittivity from admittance, a procedure verified by comparing the estimated permittivity of polytetrafluoroet… Show more

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Cited by 5 publications
(3 citation statements)
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“…1G and figs. S6 and S7), which is superior to previous sMIM reports (32,(52)(53)(54)(55)(56)(57)(58)(59).…”
Section: Ultrahigh-resolution Scannning Microwave Impedance Microscopycontrasting
confidence: 52%
“…1G and figs. S6 and S7), which is superior to previous sMIM reports (32,(52)(53)(54)(55)(56)(57)(58)(59).…”
Section: Ultrahigh-resolution Scannning Microwave Impedance Microscopycontrasting
confidence: 52%
“…There are also some relatively newly developed techniques, including scanning microwave impedance microscopy and scanning impedance microscopy (SIM) . SMIM is primarily used in semiconductor industry to quantify permittivity, capacitance, resistance, and dopant concentration and locate the imperfections or electrical inhomogeneity . SIM measures the local AC transport behavior.…”
Section: Scanning Probe Microscopy Techniquesmentioning
confidence: 99%
“…In Ref. 68, the authors created a quantification scheme extracting sample conductivity and permittivity from admittance with only the use of the capacitive calibration die provided by the instrument using simulations and MIM measurements. The prediction was verified with a sample of polytetrafluoroethylene (PTFE).…”
Section: Quantitative Measurements Of Nanoscale Permittivity and Condmentioning
confidence: 99%