Quantitative study of C—H bonding in polymerlike amorphous carbon films using<i>in situ</i>infrared ellipsometry

Heitz, T.; Drévillon, B.; Godet, C.; Bourée, Jean-Éric

doi:10.1103/physrevb.58.13957

Cited by 159 publications

(71 citation statements)

References 57 publications

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“…6a and Fig. 6b, the band at 2983 cm −1 represents sp3 CH 3 anti-symmetric vibration and the other two vibrations at 2928 cm −1 and 2873 cm −1 could be assigned to sp3 CH 2 asymmetric and symmetric vibrations [17,18]. This indicates that the bonding in samples a and b is predominantly of sp3 type.…”

Section: Raman Spectroscopy Analysismentioning

confidence: 74%

Flexible diamond-like carbon film prepared by hydrothermal electrochemical method

Tao

Zhu

et al. 2017

Materials Science-Poland

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Diamond-like carbon (DLC) thin films were prepared by hydrothermal electrochemical method in one-step process. The structural characterization of these films was carried out by scanning electron microscopy (SEM), Raman spectroscopy, and infrared reflectance spectroscopy (IR). It was found that there was an increased sp2 carbon content but decreased sp3 carbon and hydrogen contents with an increase in current density. The flexibility and internal stresses of the DLC films were affected by hydrogen, sp3 amorphous carbon and ordered crystalline sp2 carbon contents. The highly flexible DLC films with high sp3 carbon and hydrogen contents were prepared at a current density of 0.001 mA/cm 2 .

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Section: Raman Spectroscopy Analysismentioning

confidence: 74%

Flexible diamond-like carbon film prepared by hydrothermal electrochemical method

Tao

Zhu

et al. 2017

Materials Science-Poland

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“…Optical emission intensities were measured at 30 mm above the center of substrate electrode with an optical spectrometer (Ocean Optics USB2000+). The vibrational modes of the FTIR spectrum obtained from a-C:H films are classified into bending and stretching modes [26][27][28]. The bending modes are found between 1300 and 1700 cm -1 and those of stretching modes are found between 2850 and 3300 cm -1 [29][30][31].…”

Section: Experimental Methodsmentioning

confidence: 99%

Effects of discharge voltage on the characteristics of a-C:H films prepared by H-assisted Plasma CVD method

Dong

Koga

Yamashita

et al. 2015

Trans. Mat. Res. Soc. Japan

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Hydrogen bonding configurations and hydrogen content of a-C:H films deposited by H-assisted plasma CVD were investigated by Fourier transform infrared spectroscopy. Plasma parameters related to deposition rate were derived using optical emission spectroscopy. The a-C:H films contain a large number of sp 3 configurations (93%) and a few sp 2 configurations (7%). Most of the hydrogen is bonded in methyl groups which shows the structure of deposited a-C:H films is polymer-like carbon. The mass density has nearly linear decreases with increasing the hydrogen atom density, indicating that control of hydrogen content is crucial to obtain a-C:H films of high mass density. A slight increase in radical generation rate and significant increases in etching rate by hydrogen atoms lead to decrease the deposition rate when the discharge voltage increases from 170 V to 180 V.

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“…For some bending vibrations, the effective charge can be determined using some intensity ratios between symmetric and asymmetric modes, showing that the effective charges for sp 3 -CH 3 and sp 3 -CH 2 in a-C:H remain nearly constant with a value close to organic polymers. 15 However, in the case of sp 3 -CH, no clear bending mode is observed. The effective charge of the CH stretching mode (2910 cm −1 ) was determined (for each self bias) by combining ERD and IR spectroscopy data and assuming that all H atoms measured by ERD are bonded, essentially as sp 3 -CH 3 , sp 3 -CH 2 and sp 3 -CH groups.…”

Section: Hydrogen Incorporationmentioning

confidence: 95%

“…Furthermore, hyperconjugation effects make it possible to distinguish two asymmetric sp 3 -CH 3 modes at 1437 cm −1 and 1470 cm −1 corresponding respectively to (=C)-sp 3 -CH 3 (with density N 2 ) and to (-C)-sp 3 -CH 3 (with density N 1 ) indicating that methyl group vibrations can be used as a probe of their local environment. Details of the analysis have been given elsewhere 15 leading to a linear increase of (N 2 /N 1 ) versus self bias values.…”

Section: Hydrogen Incorporationmentioning

confidence: 99%

ERRATA: PHOTOLUMINESCENCE PROPERTIES AND LOCAL STRUCTURE OF POLYMER-LIKE a-C:H FILMS

Godet

Heitz

DRAVILLON

et al. 2000

Int. J. Mod. Phys. B

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In order to understand better the electronic properties of π-bonded materials, some optical and photoluminescence properties of amorphous carbon films have been investigated as a function of film density (0.9 to 1.7 g·cm −3 ). This study gives an overview of the radiative recombination properties in relation with local structure characterizations (in situ infrared ellipsometry and Raman spectroscopies) for a series of dual-plasma deposited polymer-like a-C:H films. Medium range topology has consequences in the hyperconjugation effects seen on infrared bands, as well as in optical and resonant Raman characteristics. Photoluminescence (PL) excitation spectroscopy reveals resonance features which are attributed to exciton-like electron-hole pairs in close Coulomb interaction. The PL efficiency shows a sharp quenching for densities above 1.3 g·cm −3 where a clear transition also occurs in the Raman "fingerprint". In addition, quantitative analysis of IR ellipsometry and Elastic Recoil Detection give evidence of a strong decrease of both the effective dynamical charge e * (C-H) and the bandwidth of sp 3 C-H vibrations; this is interpreted as being a result of the increase of local strains in the carbon skeleton, meaning that matrix distortions already appear at H content values as high as 46 H at.% due to film densification. An expected consequence is the mixing between π and σ molecular orbitals and the enhancement of the dissociation rate of confined electron-hole pairs. PL quenching would thus result from both a decrease of exciton confinement and an increase of the density of accessible nonradiative centers. *

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Quantitative study of C—H bonding in polymerlike amorphous carbon films usingin situinfrared ellipsometry

Cited by 159 publications

References 57 publications

Flexible diamond-like carbon film prepared by hydrothermal electrochemical method

Flexible diamond-like carbon film prepared by hydrothermal electrochemical method

Effects of discharge voltage on the characteristics of a-C:H films prepared by H-assisted Plasma CVD method

ERRATA: PHOTOLUMINESCENCE PROPERTIES AND LOCAL STRUCTURE OF POLYMER-LIKE a-C:H FILMS

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