Quantitative Subsurface Imaging by Acoustic AFM Techniques

Parlak, Zehra; Degertekin, Levent

doi:10.1007/978-3-642-27494-7_15

Cited by 4 publications

(2 citation statements)

References 31 publications

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“…In near-field methods, the spatial resolution is determined by the diameter of the probe, which makes it possible to resolve details well beyond the diffraction limit. With this approach, the detection of subsurface defects [83,84], voids or cracks [85][86][87], contaminants [87] and inner structures [88][89][90] in stiff and compliant materials [82,[91][92][93][94][95][96][97] is readily accessible. One of the first methods involving ultrasonic vibrations and AFM was introduced by Kolosov and Yamanaka in 1993 [93].…”

Section: Multifrequency Afmmentioning

confidence: 99%

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Nanoscale subsurface imaging

Soliman

Ding

Tetard

2017

J. Phys.: Condens. Matter

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The ability to probe structures and functional properties of complex systems at the nanoscale, both at their surface and in their volume, has drawn substantial attention in recent years. Besides detecting heterogeneities, cracks and defects below the surface, more advanced explorations of chemical or electrical properties are of great interest. In this article, we review some approaches developed to explore heterogeneities below the surface, including recent progress in the different aspects of metrology in optics, electron microscopy, and scanning probe microscopy. We discuss the principle and mechanisms of image formation associated with each technique, including data acquisition, data analysis and modeling for nanoscale structural and functional imaging. We highlight the advances based on atomic force microscopy (AFM). Our discussion first introduces methods providing structural information of the buried structures, such as position in the volume and geometry. Next we present how functional properties including conductivity, capacitance, and composition can be extracted from the modalities available to date and how they could eventually enable tomography reconstructions of systems such as overlay structures in transistors or living systems. Finally we propose a perspective regarding the outstanding challenges and needs to push the field forward.

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Section: Multifrequency Afmmentioning

confidence: 99%

“…The technique was coined ultrasonic atomic force microscopy (UAFM) [110]. When the excitation is applied directly to the cantilever, it is possible to control the regime in which to operate the system [97,110], i.e. linear or nonlinear.…”

Section: Multifrequency Afmmentioning

confidence: 99%

Nanoscale subsurface imaging

Soliman

Ding

Tetard

2017

J. Phys.: Condens. Matter

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Mapping the Stiffness of Nanomaterials and Thin Films by Acoustic AFM Techniques

Zauscher

Parlak

2014

Handbook of Nanomaterials Properties

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Optimization of acoustic coupling for bottom actuated scattering based subsurface scanning probe microscopy

Neer

Quesson

et al. 2019

Review of Scientific Instruments

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The characterization of buried nanoscale structures non-destructively is an important challenge in a number of applications, such as defect detection and metrology in the semiconductor industry. A promising technique is Subsurface Scanning Probe Microscopy (SSPM), which combines ultrasound with Atomic Force Microscopy (AFM). Initially, SSPM was used measure the viscoelastic contrast between a subsurface feature and its surrounding medium. However, by increasing the ultrasonic frequency to >1 GHz, it has been shown that SSPM can also measure acoustic impedance based contrasts. At these frequencies it becomes difficult to reliably couple the sound into the sample such that the AFM is able to pick up the scattered sound field. The cause is the existence of strong acoustic resonances in the sample, the transducer and the coupling layer-the liquid layer used to couple the sound energy from the transducer into the sample-in combination with the nonlinearity of the tipsample interaction. Thus, it is essential to control and measure the thickness of the coupling layer with nanometer accuracy. Here, we present the design of a mechanical clamp to ensure a stable acoustic coupling. Moreover, an acoustic method is presented to measure the coupling layer thickness in realtime. Stable coupling layers with thicknesses of 700 ± 2 nm were achieved over periods of 2-4 hours. Measurements of the downmixed AFM signals showed stable signal intensities for >1 hour. The clamp and monitoring method introduced here makes scattering based SSPM practical, robust and reliable and enables measurement periods of hours.

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Quantitative Subsurface Imaging by Acoustic AFM Techniques

Cited by 4 publications

References 31 publications

Nanoscale subsurface imaging

Nanoscale subsurface imaging

Mapping the Stiffness of Nanomaterials and Thin Films by Acoustic AFM Techniques

Optimization of acoustic coupling for bottom actuated scattering based subsurface scanning probe microscopy

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