2004
DOI: 10.1002/sia.1654
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Quantitative surface chemical‐state microscopy by x‐ray photoelectron spectroscopy

Abstract: The realization of surface chemical-state microscopy by x-ray photoelectron spectroscopy requires the resolution of overlapped chemical states, an adequate background description and the ability to quantify data. This can be achieved only by the acquisition and analysis of multi spectral data sets. Here we describe the software to perform this analysis, which is capable of allowing for small amounts of differential charging and for incorporation of knowledge about the sample. We demonstrate its use on a patter… Show more

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Cited by 36 publications
(21 citation statements)
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“…Images were collected over a range covering the Ni 2p 3/2 envelope of 848 eV-870 eV at an interval of 0.2 eV, using medium magnification (400 ð 400 µm), an 80 eV pass energy, imaging aperture 2, charge neutralizer set to 1.6 A, 2.8 eV, and a dwell time of 240 s. X-ray focusing was assisted by drilling two holes into the surface of the Ni metal to produce regions of zero photoelectron counts. Our procedure is similar to that used by Barkshire et al,18,19 Prutton et al, 20 Artyushkova and Fulghum, 21,22 Walton and Fairley, 23,24 and Smith, Briggs, and Fairley. 25 The image dataset was then processed using the CasaXPS software.…”
mentioning
confidence: 92%
“…Images were collected over a range covering the Ni 2p 3/2 envelope of 848 eV-870 eV at an interval of 0.2 eV, using medium magnification (400 ð 400 µm), an 80 eV pass energy, imaging aperture 2, charge neutralizer set to 1.6 A, 2.8 eV, and a dwell time of 240 s. X-ray focusing was assisted by drilling two holes into the surface of the Ni metal to produce regions of zero photoelectron counts. Our procedure is similar to that used by Barkshire et al,18,19 Prutton et al, 20 Artyushkova and Fulghum, 21,22 Walton and Fairley, 23,24 and Smith, Briggs, and Fairley. 25 The image dataset was then processed using the CasaXPS software.…”
mentioning
confidence: 92%
“…[20] These methods were pioneered by Fairley and Walton in XPS imaging, and were refined and extended over the last years. [21,22 22,23] One of the strongest recent advances in parallel imaging is certainly the quantitative analysis of XPS images [24,15,25] with the advent of delay-line detectors.…”
Section: Review Of Conventional Xps Imaging Methodsmentioning
confidence: 99%
“…Spectromicroscopy, carried out by acquiring a series of parallel images at fixed energy intervals over an energy region of interest (e.g. a complex core level at high energy resolution, or a survey scan at low energy resolution) would normally be very time-consuming, but Walton and Fairley have recently demonstrated approaches to noise reduction using principal component analysis (PCA) 3 and, particularly, single value decomposition (SVD) sorting prior to PCA, 4 which can significantly reduce data acquisition times. These approaches, and other useful features for data interpretation which exploit them, have been incorporated into evolving thirdpart software.…”
Section: Introductionmentioning
confidence: 99%