Quantitative temperature measurement of multi-layered semiconductor devices using spectroscopic thermoreflectance microscopy

Kim, Dong Uk; Park, Kwan Seob; Jeong, Chan Bae; Kim, Geon Hee; Chang, Ki Soo

doi:10.1364/oe.24.013906

Cited by 20 publications

(9 citation statements)

References 18 publications

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“…In 2016, Kim et al [85], register thermoreflectance spectra, reflection and thermoreflectance images of the multi-layered semiconductor devices (polycrystalline silicon micro-resistor on a SiO 2 layer/Si substrate using spectroscopic thermoreflectance microscopy based on the CCD camera.…”

Section: Thermoreflectance In Analysis Of Devices and Materialsmentioning

confidence: 99%

Thermoreflectance spectroscopy—Analysis of thermal processes in semiconductor lasers

Pierścińska

2017

J. Phys. D: Appl. Phys.

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This review focuses on theoretical foundations, experimental implementation and an overview of experimental results of the thermoreflectance spectroscopy as a powerful technique for temperature monitoring and analysis of thermal processes in semiconductor lasers. This is an optical, non-contact, high spatial resolution technique providing high temperature resolution and mapping capabilities. Thermoreflectance is a thermometric technique based on measuring of relative change of reflectivity of the surface of laser facet, which provides thermal images useful in hot spot detection and reliability studies. In this paper, principles and experimental implementation of the technique as a thermography tool is discussed. Some exemplary applications of TR to various types of lasers are presented, proving that thermoreflectance technique provides new insight into heat management problems in semiconductor lasers and in particular, that it allows studying thermal degradation processes occurring at laser facets. Additionally, thermal processes and basic mechanisms of degradation of the semiconductor laser are discussed.

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Section: Thermoreflectance In Analysis Of Devices and Materialsmentioning

confidence: 99%

Thermoreflectance spectroscopy—Analysis of thermal processes in semiconductor lasers

Pierścińska

2017

J. Phys. D: Appl. Phys.

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“…For system control, the data acquisition (DAQ) board generates trigger signals for both the camera image acquisition and the device bias modulation, and also performs precise synchronization between the two triggers. The control and signal process to obtain thermoreflectance image are described in the reference [10]. Fig.…”

Section: Abstract: Infrared Thermoreflectance Photothermal Microscopymentioning

confidence: 99%

Thermal Imaging Microscope and Applications

Kim¹,

Jeong²,

Choi³

et al. 2017

Proceedings of the 2017 Asia International Conference on Quantitative InfraRed Thermography

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“…As a result, the peak wavelength shift method is not well-suited for NW LEDs. Infrared (IR) thermal imaging [37][38][39], widely used in the semiconductor industry [40], appears to be the most appropriate method for assessing the flexible NW LED temperature variations.…”

Section: Introductionmentioning

confidence: 99%

Heat Dissipation in Flexible Nitride Nanowire Light-Emitting Diodes

et al. 2020

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We analyze the thermal behavior of a flexible nanowire (NW) light-emitting diode (LED) operated under different injection conditions. The LED is based on metal–organic vapor-phase deposition (MOCVD)-grown self-assembled InGaN/GaN NWs in a polydimethylsiloxane (PDMS) matrix. Despite the poor thermal conductivity of the polymer, active nitride NWs effectively dissipate heat to the substrate. Therefore, the flexible LED mounted on a copper heat sink can operate under high injection without significant overheating, while the device mounted on a plastic holder showed a 25% higher temperature for the same injected current. The efficiency of the heat dissipation by nitride NWs was further confirmed with finite-element modeling of the temperature distribution in a NW/polymer composite membrane.

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Quantitative temperature measurement of multi-layered semiconductor devices using spectroscopic thermoreflectance microscopy

Cited by 20 publications

References 18 publications

Thermoreflectance spectroscopy—Analysis of thermal processes in semiconductor lasers

Thermoreflectance spectroscopy—Analysis of thermal processes in semiconductor lasers

Thermal Imaging Microscope and Applications

Heat Dissipation in Flexible Nitride Nanowire Light-Emitting Diodes

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