A δ-Pu(Ga-7 at. %) alloy has been characterized using x-ray photoelectron spectroscopy in the as-received condition, during sputter depth profiling through the surface oxide and following oxidation either by exposure to Langmuir quantities of oxygen or by oxidation from the residual gases in the ultrahigh vacuum environment. To enable quantitative analysis, we develop a procedure to separate the C 1s and Pu 5p1/2 peak intensities, which occur at the same binding energy. Sputter yields for the various oxides and alloys were calculated. The plutonium, oxygen, and gallium chemical state plots are presented for the oxides and alloy measured here.