Ground-state cooling of mesoscopic mechanical resonators is a fundamental requirement for test of quantum theory and for implementation of quantum information. We analyze the cavity optomechanical cooling limits in the intermediate coupling regime, where the light-enhanced optomechanical coupling strength is comparable with the cavity decay rate. It is found that in this regime the cooling breaks through the limits in both the strong and weak coupling regimes. The lowest cooling limit is derived analytically at the optimal conditions of cavity decay rate and coupling strength. In essence, cooling to the quantum ground state requires Qm > 2.4n th , with Qm being the mechanical quality factor and n th being the thermal phonon number. Remarkably, ground-state cooling is achievable starting from room temperature, when mechanical Q-frequency product Qmν > 1.5 × 10 13 , and both of the cavity decay rate and the coupling strength exceed the thermal decoherence rate. Our study provides a general framework for optimizing the backaction cooling of mesoscopic mechanical resonators.PACS numbers: 42.50. Wk, 07.10.Cm, 42.50.Lc Cavity optomechanics [1][2][3][4][5] provides an important platform for manipulation of mesoscopic mechanical resonators in the quantum regime. A prominent example is motional ground-state cooling, which reduces the thermal noise of the mechanical resonator all the way to the quantum ground state [6,7]. This offers as the first crucial step for most applications such as the exploration of quantum-classical boundary [8][9][10] and quantum information processing [11][12][13]. Recently cooling of mechanical resonators has been demonstrated using various approaches including pure cryogenic cooling [14], feedback cooling [15][16][17][18][19] and cavity-assisted backaction cooling [6,7,[20][21][22][23][24][25][26][27][28], along with many theoretical and experimental efforts on novel cooling schemes, such as cooling with dissipative coupling [29][30][31][32][33] [43]. It is theoretically shown that groundstate cooling is possible in the resolved sideband regime [44][45][46], where the mechanical resonance frequency is greater than the decay rate of the optical cavity, indicating the resolved mechanical sideband from cavity mode spectrum. These analyses are in the weak coupling regime, where the light-enhanced optomechanical coupling strength G is weak compared with the cavity decay rate κ, and thus the coupling is regarded as a perturbation to the optical field. Within this regime a larger coupling strength is better since the net cooling rate (optical damping rate) scales as Γ wk = 4G 2 /κ. On the other hand, when G ≫ κ, the system is in the strong coupling * Electronic address: yfxiao@pku.edu.cn; URL: www.phy.pku.edu.cn/∼yfxiao/index.html regime [43,[47][48][49][50][51][52], where normal-mode splitting occurs and the phonon occupancy exhibits Rabi-like oscillation with reversible energy exchange between optical and mechanical modes. Then the cooling rate saturates with the maximum value of Γ str = κ, and...