2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2023
DOI: 10.23919/sispad57422.2023.10319593
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Quantum Mechanical Modeling Techniques for High-Performance Low-k Amorphous Material Engineering: a Showcase for aBN

Blanka Magyari-Köpe,
Hans Hsu,
Jeff Wu
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