Devices relying on microwave circuitry form a cornerstone of many classical and emerging quantum technologies. A capability to provide in-situ, noninvasive and direct imaging of the microwave fields above such devices would be a powerful tool for their function and failure analysis. In this work, we build on recent achievements in magnetometry using ensembles of nitrogen vacancy centers in diamond, to present a widefield microwave microscope with few-micron resolution over a millimeterscale field of view, 130 nT Hz −1/2 microwave amplitude sensitivity, a dynamic range of 48 dB, and sub-ms temporal resolution. We use our microscope to image the microwave field a few microns above a range of microwave circuitry components, and to characterize a novel atom chip design. Our results open the way to high-throughput characterization and debugging of complex, multicomponent microwave devices, including real-time exploration of device operation.Microwave (MW) devices play a critical role in telecommunications, defence, and quantum technologies. Device characterization via high resolution MW field imaging is a long-standing goal [1][2][3], which promises to overcome the limitations of conventional characterization techniques. For example, it is difficult to identify internal features of complex devices using S-parameter measurements of reflection and transmission through external device ports [4,5]. A high-throughput MW imaging method would allow for fast prototype iteration, and for more adventurous development of novel device architectures. Furthermore, MW imaging is of interest for spin-wave imaging in magnonic systems [6,7], is under investigation for medical imaging [8,9], and can be used to characterize materials [10] and biological samples [11]. In recent years, alkali vapor cells with atoms in the ground [12][13][14][15][16] or highly excited Rydberg [17][18][19] states, and nitrogen-vacancy (NV) centers in diamond [20-23] have shown promise for intrinsically calibrated MW imaging in simple, vacuum-and cryogen-free environments. Ensembles of NVs in a widefield diamond microscope [24][25][26][27][28] provide an excellent balance between the sensitivity and wide field of view (FOV) offered by vapor cells and the nanoscale spatial resolution of single NV centers [29], and so far have been primarily employed for imaging static and low-frequency magnetic fields. In this work, we demonstrate high-throughput widefield diamond microscopy for MW device characterization, enabled by a step-change we have achieved in microscope performance.Our microscope integrates advances in camera speed, experiment control, novel diamond material, laser illu-