2020
DOI: 10.1038/s41598-020-60484-7
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Quantum Tunneling Hygrometer with Temperature Stabilized Nanometer Gap

Abstract: We present the design, fabrication and response of a humidity sensor based on electrical tunneling through temperature-stabilized nanometer gaps. The sensor consists of two stacked metal electrodes separated by ~2.5 nm of vertical air gap. Upper and lower electrodes rest on separate 1.5 μm thick polyimide patches with nearly identical thermal expansion but different gas absorption characteristics. When exposed to a humidity change, the patch under the bottom electrode swells but the patch under the top electro… Show more

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Cited by 12 publications
(8 citation statements)
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References 31 publications
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“…A similar nanogap concept was previously used but limited to in-liquid analysis and detection of bio-molecules such as proteins and DNA [8]- [14]. We previously introduced the concept for quantum tunneling based gas sensing with preliminary results [15]- [21]. This paper reports the detailed proof-of-concept results of a new family of ultra-low power nano air-gap sensors based on molecular bridge formation across nanogap electrodes.…”
Section: Introductionmentioning
confidence: 95%
See 1 more Smart Citation
“…A similar nanogap concept was previously used but limited to in-liquid analysis and detection of bio-molecules such as proteins and DNA [8]- [14]. We previously introduced the concept for quantum tunneling based gas sensing with preliminary results [15]- [21]. This paper reports the detailed proof-of-concept results of a new family of ultra-low power nano air-gap sensors based on molecular bridge formation across nanogap electrodes.…”
Section: Introductionmentioning
confidence: 95%
“…A similar nanogap concept was previously used but limited to in-liquid analysis and detection of biomolecules such as proteins and DNA [8][9][10][11][12][13][14] . We previously introduced the concept for quantum tunneling-based gas sensing with preliminary results [15][16][17][18][19][20][21][22][23][24][25] .…”
Section: Introductionmentioning
confidence: 99%
“…Kim et al have recently developed a novel sensing technique for highly sensitive biosensing based on the quantum-tunneling effect using nanogap break-junctions [ 198 , 199 , 200 , 201 , 202 , 203 , 204 , 205 , 206 ]. Furthermore, Mastrangelo et al have also been responsible for developing zero-power and highly sensitive polymeric sensors for VOC detection [ 207 , 208 , 209 , 210 , 211 , 212 , 213 ].…”
Section: Nano-biosensors For Cancer Detection and Future Prospectimentioning
confidence: 99%
“…In recent decades, miniaturized humidity sensors have been realized using various transduction methods [1,2,3,4,5,6,7] for a wide range of applications such as improving indoor comfort in homes and automobiles, humidity monitoring in semiconductor processing facilities [8], food processing industries [9], medical facilities [10] and, Internet-of-Things (IoT) based frameworks [11]. The push for the need for low-power chemical sensors [12,13,14] has been quite strong due to the growing importance of IoT sensor nodes across the world.…”
Section: Introductionmentioning
confidence: 99%