Quartz Resonant Pressure Sensor Based on Bow-Inspired Rationally Designed Device Configuration

Hu, Liangwei; Wu, Guirong; Zhao, Yunlong; Xue, Chenyang; Gao, Libo

doi:10.1109/jsen.2023.3317417

Cited by 3 publications

References 37 publications

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Design, fabrication, and evaluation of a novel highly sensitive tuning fork pressure sensor for precise liquid level measurement

Vattaparambil Sreedharan,

Zhang,

Naghdi

et al. 2024

Journal of Applied Physics

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This article investigates the under-explored potential of utilizing a thin stainless-steel diaphragm coupled with a quartz tuning fork sensor for liquid depth measurements. The focus is on monitoring molten salt fluid levels in nuclear reactors and concentrated solar power systems. Addressing a literature gap, the research explores cantilever-type configurations of a double-ended quartz tuning fork resonator, with a no-load resonance frequency of 17.37 kHz, on thin stainless-steel diaphragms for fluid depth measurement at room temperature. As the fluid depth increases, hydro-static pressure acting on a 20 μm diaphragm causes deflection, bending a tuning fork. The resulting change in resonance frequency correlates with fluid depth. Experimental setups assess the tuning fork’s sensitivity to strain and bending, revealing strain sensitivity of 7.83 Hz/μ strain (450.78 ppm/μ strain) and bending sensitivity of 0.09 Hz/μm (5.18 ppm/μm). The pressure sensor assembly, tested in a water tank, exhibits a sensitivity of −0.28 Hz/mm (−16.12 ppm/mm) in a single cantilever-type configuration. Despite a limited linear range, it effectively measures water depth changes as small as 0.7 mm. Exploring a double cantilever-type configuration yields a sensitivity of 0.07 Hz/mm (4.03 ppm/mm) with a broader linear range. The article discusses the reasons for opposite sensitivity and highlights the advantages of each configuration. Beyond molten salt level monitoring, the technology’s applications may extend to fluid depth and pressure measurements in industrial and domestic settings.

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