1995
DOI: 10.1063/1.113370
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Quasi-phase-matched second-harmonic generation in AlGaAs waveguides with periodic domain inversion achieved by wafer-bonding

Abstract: Quasi-phase-matched second-harmonic generation is observed in an AlGaAs waveguide. The AlGaAs waveguide is epitaxially grown on a template substrate where a periodic crystal domain inversion is achieved using wafer bonding and organometallic chemical vapor deposition. A scanning electron micrograph of the waveguide cross section reveals a distinct propagation of the crystal domain boundaries in the epitaxial growth direction. Second-harmonic generation measurements on a fabricated rib-loaded waveguide show a c… Show more

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Cited by 143 publications
(62 citation statements)
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“…The substrate of the flipped wafer is then etched off and ridge waveguides are formed by lithography. Yoo et al used this fabrication technique with AlGaAs waveguides to demonstrate SHG [31] and DFG [32].…”
Section: Quasi-phase Matchingmentioning
confidence: 99%
“…The substrate of the flipped wafer is then etched off and ridge waveguides are formed by lithography. Yoo et al used this fabrication technique with AlGaAs waveguides to demonstrate SHG [31] and DFG [32].…”
Section: Quasi-phase Matchingmentioning
confidence: 99%
“…Epitaxial growth of orientation-patterned materials, with lithographically controlled patterns, has greatly opened the range of applicability of QPM. 53,58 In template controlled growth, a substrate is patterned lithographically such that the orientation of subsequently grown films is controlled by the pattern on the substrate. Multilayer, thin-film growth on such a template, for example, by molecular-beam epitaxy or organometallic vapor-phase epitaxy, can produce a QPM waveguide device, while thick-film growth on the template, for example, by hydride vapor-phase epitaxy, can produce a bulk (millimeter-thick) film for QPM interactions.…”
Section: Fundamentals Of Opomentioning
confidence: 99%
“…Since some of the electrical and optical properties of crystals, as well as their processing characteristics depend on the crystal orientation, wafer fusion gives an extra degree of freedom to fabricate new types of devices. For example, Yoo [9] has used wafer fusion to change the crystal orientation periodically to realize quasi-phase-matched second-harmonic generation (SHG).…”
Section: Push-pull Fused Vertical Coupler Switchmentioning
confidence: 99%