HPM (high-power microwave) weapons become the major threat to individual equipment which is developing to be unmanned and intelligent. A typical inertial device of individual equipment is taken as the research object to find out its coupling paths based on the analysis of function and structural characteristics, and the effects of HPM coupling to the typical inertial device are simulated by the numerical simulation software CST. The results shows that power and signal cables of MEMS (Micro-Electro-Mechanical System) accelerometer are the main coupling paths of HPM; The power cable has size coupling effect which is strongest when the sum of the cable length and twice the distance to the “ground” is equal to odd times of quarter wavelength, and weakest when the cable length is equal to even times of quarter wavelength; The signal cable has wavelength coupling effect that is positively correlated with cable length which is less than wavelength, and not affected by cable length which is greater than wavelength; The screen in signal cable not only greatly reduces the peak value of coupling voltage, but also effectively reduces the influence of cable length on the coupling effect. The research results provide support for the protection of individual inertial devices, and also provide a reference for the design of HPM weapons.