Quasi-static kinematics model for motion errors of closed hydrostatic guideways in ultra-precision machining

Shi, Chen; Wang, Zhenzhong; Peng, Yunfeng; Lei, Penghui; Li, Chenlei

doi:10.1016/j.precisioneng.2021.03.004

Cited by 10 publications

(12 citation statements)

References 35 publications

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“…In the research process, the initial data of the surface profile of the hydrostatic guide rails were measured, and then the motion straightness of the table movement was calculated according to the established model. Reference [6] also achieved an ideal prediction result.…”

Section: Self-consistent Setting Of the Initial State Of The Guide Railsmentioning

confidence: 87%

“…The surface profile of the guide rails is usually characterized by a chord function. For example, in the calculation in Reference [6], a set of sine functions is used to express the surface parameters of the guide rail before fine grinding. In this paper, we set the following function as the initial rail surface profile:…”

Section: Self-consistent Setting Of the Initial State Of The Guide Railsmentioning

confidence: 99%

“…Here, we take the coefficient of correlation to denote the prediction accuracy of the curves in Figure 7. The mathematical expression can be given as [6]:…”

Section: Self-consistent Setting Of the Initial State Of The Guide Railsmentioning

confidence: 99%

“…Therefore, high efficiency and high surface accuracy are realized in the grinding process, which helps to shorten the processing cycle. To this end, our research group has successfully participated in the development of UPG80, UPG60, and other series of ultra-precision grinding machines for optical components [6], all of which adopt hydrostatic guide rails.…”

Section: Introductionmentioning

confidence: 99%

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Simulation, Modeling and Experimental Research on the Thermal Effect of the Motion Error of Hydrostatic Guideways

et al. 2021

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Hydrostatic guideways are widely applied in ultra-precision machine tools, and motion errors undermine the machining accuracy. Among all the influence factors, the thermal effect distributes most to motion errors. Based on the kinematic theory and the finite element method, a 3-degrees-of-freedom quasi-static kinematics model for motion errors containing the thermal effect was established. In this model, the initial state of the closed rail as a “black box” is regarded, and a self-consistent setting method for the initial state of the guide rails is proposed. Experiments were carried out to verify the thermal motion errors simulated by the finite element method and our kinematics model. The deviation of the measured thermal vertical straightness error from the theoretical value is less than 1 μm, which ensured the effectiveness of the model we developed.

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Section: Self-consistent Setting Of the Initial State Of The Guide Railsmentioning

confidence: 87%

Section: Self-consistent Setting Of the Initial State Of The Guide Railsmentioning

confidence: 99%

“…Here, we take the coefficient of correlation to denote the prediction accuracy of the curves in Figure 7. The mathematical expression can be given as [6]:…”

Section: Self-consistent Setting Of the Initial State Of The Guide Railsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Simulation, Modeling and Experimental Research on the Thermal Effect of the Motion Error of Hydrostatic Guideways

et al. 2021

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“…Even though the aforementioned analysis approaches unfolded their due activeness, it could be acknowledged that the corresponding imperfections remained to be captured easily. In consequence, targeted at avoiding those defectiveness as much as possible, the kinematic theory based quasi-static analysis model with less simplification was effectively established and verified in the previous research, but it was capable of predicting the 2-DOF motion errors of closed hydrostatic guideways only, 25 and the experiments were performed on the X axis of ultra-precision grinding machine UPG80, as drawn in Figure 1(b). More specifically, the guide rails of the bed were ground in the same horizontal surface grinding process by the other machine tool automatically, so that the profile errors of the main and vice guide rails were assumed to be the same with each other, then the whole hydrostatic table with six hydrostatic guide shoes (HGSs) in X axis could be simplified as the half hydrostatic table with three HGSs.…”

Section: Introductionmentioning

confidence: 99%

Modeling and analysis on motion accuracy of hydrostatic guideways incorporating the manual lapping effect

Shi

Wang

Lei

et al. 2023

Proceedings of the Institution of Mechanical Engineers, Part C:

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As one of the crucial functional units in ultra-precision machines, the hydrostatic guideways have been commonly adopted due to their own superiority. Although the existed analysis approaches can enable researchers to understand the influence of various design parameters on motion accuracy of hydrostatic guideways, the corresponding imperfections remain to be captured easily. In this paper, targeted at avoiding those defectiveness as much as possible, the kinematic theory based quasi-static analysis model with less simplification is developed directly, wherein the profile pattern difference between main and vice guide rails induced by the manual lapping technology is taken into consideration, and the general structure of hydrostatic guideways extracted from Z axis of the ultra-precision grinding machine UPG80 is determined as the research object. Three CASE studies are proposed orderly to verify the correctness and effectiveness of the established analytical model, and the results demonstrate that the variation trends of the theoretically calculated vertical straightness errors are in good accordance with those of the experimentally measured. Furthermore, the fluctuation amplitude deviation between the predicted and the measured motion accuracy does occur in CASE 3, which should be attributed to the accumulated thermal effect revealed via an experimental platform of hydrostatic guideways with similar structure type to the research object. It also is figured out that, the variation of three components of guide rails’ profile errors caused by the thermal accumulation leads to the fluctuation amplitude deviation reflected in CASE 3, and the level of influence can be known as Amplitude component ( E) > Phase component ( φ) Upside wavelength component ( λup) > Downside wavelength component ( λdown). This study can serve as a valuable foundation for improving the motion accuracy of hydrostatic guideways and is also confirmed to be valuable to the peer designers.

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Comprehensive study of material removal mechanism of polycrystalline copper during ultra-precision cutting using molecular dynamics

Zhou,

Yu,

Wang

et al. 2024

Precision Engineering

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Quasi-static kinematics model for motion errors of closed hydrostatic guideways in ultra-precision machining

Cited by 10 publications

References 35 publications

Simulation, Modeling and Experimental Research on the Thermal Effect of the Motion Error of Hydrostatic Guideways

Simulation, Modeling and Experimental Research on the Thermal Effect of the Motion Error of Hydrostatic Guideways

Modeling and analysis on motion accuracy of hydrostatic guideways incorporating the manual lapping effect

Comprehensive study of material removal mechanism of polycrystalline copper during ultra-precision cutting using molecular dynamics

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