2022
DOI: 10.48550/arxiv.2201.10425
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Qubit-compatible substrates with superconducting through-silicon vias

K. Grigoras,
N. Yurttagül,
J. -P. Kaikkonen
et al.

Abstract: We fabricate and characterize superconducting through-silicon vias and electrodes suitable for superconducting quantum processors. We measure internal quality factors of a million for test resonators excited at single-photon levels, when vias are used to stitch ground planes on the front and back sides of the wafer. This resonator performance is on par with the state of the art for silicon-based planar solutions, despite the presence of vias. Via stitching of ground planes is an important enabling technology f… Show more

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Cited by 2 publications
(2 citation statements)
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“…Even if the qubits can be densely packed up on a chip (size: L × L), it is nevertheless extremely difficult to route all the control wires from the perimeter (length ∝ L) to individual qubits (density ∝ L 2 ) due to the unmatched scaling law; let alone to avoid crosstalk between wires. In recent years, there have been substantial efforts to exploit the third dimension to relieve this pain with various technologies borrowed from the semiconductor chip packaging, such as flip-chip bonding and through-silicon vias [331][332][333][334][335][336][337][338]. Aside from expanding the space for wiring, a different approach is to reuse the wire for multiple targets.…”
Section: Superconducting Qubitsmentioning
confidence: 99%
“…Even if the qubits can be densely packed up on a chip (size: L × L), it is nevertheless extremely difficult to route all the control wires from the perimeter (length ∝ L) to individual qubits (density ∝ L 2 ) due to the unmatched scaling law; let alone to avoid crosstalk between wires. In recent years, there have been substantial efforts to exploit the third dimension to relieve this pain with various technologies borrowed from the semiconductor chip packaging, such as flip-chip bonding and through-silicon vias [331][332][333][334][335][336][337][338]. Aside from expanding the space for wiring, a different approach is to reuse the wire for multiple targets.…”
Section: Superconducting Qubitsmentioning
confidence: 99%
“…Another approach involves the utilization of parallel plate capacitors using van der Waals materials [20,21] for the same purpose. Flip-chip module [18,[22][23][24][25] and three-dimensional (3D)-integration scheme with throughsilicon vias (TSVs) [26,27] take full advantage of the 3D space, which improve the signal integrity and quantum decoherence induced by the wire-bonding technique.…”
Section: Introductionmentioning
confidence: 99%