1983
DOI: 10.1007/bf00544142
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R.F.-plasma system for the production of ultrafine, ultrapure silicon carbide powder

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Cited by 81 publications
(27 citation statements)
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“…Another approach is to create a plasma to obtain the decomposition of a precursor that can be gaseous, liquid or solid. Different groups around the world have developed such techniques, using different types of precursors (SiO 2 + CH 4 , Si anode + CH 4 , coarse SiC...) or plasma source (transfer arc, DC or RF thermal plasma...) [19][20][21][22][23][24][25]. One of the tricky parts concerning the use of powders as a precursor is to manage to introduce the powder inside the dense plasma.…”
mentioning
confidence: 99%
“…Another approach is to create a plasma to obtain the decomposition of a precursor that can be gaseous, liquid or solid. Different groups around the world have developed such techniques, using different types of precursors (SiO 2 + CH 4 , Si anode + CH 4 , coarse SiC...) or plasma source (transfer arc, DC or RF thermal plasma...) [19][20][21][22][23][24][25]. One of the tricky parts concerning the use of powders as a precursor is to manage to introduce the powder inside the dense plasma.…”
mentioning
confidence: 99%
“…plasma system itself. Hollabaugh et al (20) developed a high-temperature plasma tube that overcomes the meltdown problem of the water and gas-cooled quartz plasma tubes most commonly used. The r.f.…”
Section: Induction Dlasma Technology Evolutionmentioning
confidence: 99%
“…In order to obtain high performance SiC ceramics, several alternative methods have hence been proposed for the synthesis of high purity and selected quality powder over the last decades. Among these, the most  common methods are: physical vapor transport (PVT) technique, chemical vapor deposition (CVD), self-propagating high temperature synthesis (SHS), sol-gel, microwave, and plasma driven reactions [6][7][8][9][10][11][12]. In addition, special attention was given in recent years towards synthesis of nanosized SiC powder to allow the production of high performance products like structural components.…”
Section: Introductionmentioning
confidence: 99%