Three batches of polycrystalline silicon (polysilicon) produced with the fluidized bed reactor method were used to study the fracture behavior using micro-scale and macro-scale indentation techniques. The fracture toughness was determined to be 0.60, 0.74, and 0.86 MPa m 0.5 using Vickers microhardness tests for three samples with a high, medium, and low hydrogen content, respectively. In the same order of the samples, Rockwell hardness tests showed that they failed at applied loads of 45, 55, and 60 kg, respectively. These results show that the fracture behaviors of both techniques are in agreement; the highest toughness materials can withstand higher loads prior to fracture in the Rockwell hardness test. The microstructure of the granular product has been documented and the only significant difference between the samples is the solute hydrogen content. Therefore, a Rockwell hardness instrument can be used as a rapid way to assess the relative fracture toughness of the as-grown polysilicon for solar applications, and the technique is insensitive to small amounts of porosity in these materials.