Radial non-uniform piezoelectric response of perovskite islands in thin PZT films

Abstract

A comparative study of the morphology and piezoelectric response of island and continuous perovskite thin PZT films deposited on a platinized silicon substrate Si/SiO2/TiO2/Pt was carried out. It was shown that the self-polarization value of micron-size island films was about 1.4 times higher than that of continuous films. It is assumed that the difference is due to the relaxation of tensile mechanical stresses caused by silicon substrate at the island periphery.